Optimization of Integrated Magnetic Field Sensors

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We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given constraints on the offset by changing the conductivity of the Hall plate locally.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 120 - 123
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4