A New 3D Analytical Design Model of an Electrostatic Micromotor Using Multi-objective Approach

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This paper presents a new design technique for finding the optimal structures of small size variable capacitance (VC) side-drive micromotors, based on a new 3D analytical micromotor design model. Two objective functions in mutual contrast, depending on th

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 165 - 168
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4