Ren H., Jog A., Fair R.B.
Duke University, US
Keywords: MEMS reliability, microelectromechanical system (MEMS), robust design, statistical MEMS design, Taguchi method, yield optimization
A three-step technique for MEMS quality optimization is demonstrated. It exploits the relative merits of its constituent optimization components. Analog Devices’ ADXL50 accelerometer was the test device with microstructure dimen-sions serving as design parameters. Manufacturing design rules  and sensor performance requirements served as design constraints. A static model relating input acceleration to sensed voltage was used, neglecting sensor and signal con-ditioning dynamics. The trimming yield of the ADXL50, with sensitivity as the design target, was improved by 37%. We show that the three-step method enables the search for an optimal design in a semi-automatic manner by facilitating user interaction. Our final goal is to enable the generation of MEMS mask layout while ensuring robust designs with minimum sensitivity to fabrication process variations.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 169 - 172
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems