A novel gas sensor device based on a network of tin dioxide (SnO2) nanowires is presented. The high surface-to-volume ratio presented by the network of ultralong nanowires enables increased gas sensing performances in comparison to [...]
Since the late 70s, new approaches have been proposed to replace conventional gas chromatograph apparatus by silicon based micro fabricated separation systems. The main challenge in miniaturized gas chromatography consists in the reproducible and collective [...]
The present work reports ammonia (NH3) gas sensing properties of Graphene film synthesized by chemical vapor deposition (CVD) in ambient condition. Graphene with a large area is synthesized on Cu foils by chemical vapor deposition [...]
In this study, a highly sensitive hydrogen gas sensor of the multi-layer and micro-heater type was designed and fabricated using a microelectromechanical system (MEMS) process. The dimension of fabricated hydrogen gas sensor was 5 mm×4 [...]
This paper discusses the design, optimization, simulation and fabrication of 3D electrostatic MEMS energy harvester. It is one part of self-powered microsystem. It is able to work in all 3 axis which increases the efficiency. [...]
A new physical sensor design for strain measurement for wind turbine blades is presented. While the proposed sensors are highly sensitive, they are based on simple operating principle: application of an input force, which is [...]
Under overcharge conditions, the interior temperature of polymer lithium-ion rechargeable batteries will rapidly increase. Such batteries are adopted in electric vehicles that require rapid charging and discharging, and this process causes rapid heating, raising safety [...]
The threat of a chemical attack continues to grow and recent examples such as the terrorist attack of the Metro of Tokyo have shown that organophosphorus agents (OPs) are powerful neurotoxic weapons. There is still [...]
In this work CuO nanoparticles are synthesized using sol gel technique and water based nano fluids of two different volume concentrations are prepared. Thermal conductivity and viscosity are measured. A copper heat sink having rectangular [...]
We have developed a method of forming PZT films on silicon substrates with a high piezoelectric coefficient using RF sputtering. Films have been formed on 6 inch wafers with thickness variation of less than +/-5% [...]
Cell-based studies yield data averaged over a large number of cells which overlook the rich information that can possibly be obtained when cells are studied individually. For this reason, much emphasis has been placed over [...]
In electrical references, if primary references define the international standards, secondary references are the key points for precision measurement or electrical conversion. The principle of secondary AC voltage references based on MEMS using the pull-in [...]
In this study, we developed an optofluidic device for analyzing the mass transfer of materials in a microfluidic channel. This device uses refractometry to monitor concentration in contrast to typical methods which use florescent markers. [...]
This research addresses the development of a unique pixellated diffractive phase spatial light modulator (SLM) that is monolithically integrated onto a CMOS backplane to enable extremely energy-efficient video projection systems suitable for consumer electronics and [...]
Algae are a promising candidate for large-scale production of biofuels, an important source of renewable energy . A significant portion (20-40%) of the cost in the traditional processing comes from concentrating (dewatering) the algae from [...]
Electrowetting-on-dielectric (EWOD) is the phenomenon in which the wetting properties of a liquid are modified by the influence of an applied electric field. By EWOD, a conducting or non-conducting liquid can be moved using a [...]
Market requirements push on small, lightweight portable device with advance feature for user interface, gesture recognition and camera features. New generation of portable device required gyroscope sensing capability for advanced gaming, high-performance motion detection, gesture [...]
InvenSense, a fabless MEMS company has successfully transferred its proprietry fabriction process has been to multiple foundries to support high volume production of multiple products. The process supports CMOS electronics integration and incorporates wafer level [...]
, Cardinali G.C.
, Cozzani E.
, Elmi I.
, Mancarella F.
, Messina M.
, Nubile A.
, Poggi A.
, Zampolli S.
, CNR, IT
Microvalves are basic components of microfluidic systems and MEMS technology has provided an opportunity for microvalves to be packaged onto a board with integrated microfluidic channels. For the successful miniaturization of integrated fluidic devices, it [...]
Piezoelectric materials are of great interest for powerful actuation in MEMS devices. Due to its large electromechanical coupling coefficient Lead Zirconate Titanate (PZT) is one of the most favourable materials for realisation of fast and [...]
Through wafer etching of silicon using anisotropic wet chemical etch ants like KOH is a key process in the fabrication of many types of MEMS devices. In this work, a dual side 2 mask process [...]
Although there are many modes of the ejection mechanism from the EHD nozzle , a cone-jet mode, a pulse-jet mode and a micro-dripping mode have been analyzed by capturing the jetting phenomena using organic solvents [...]
Combining soft x-ray lithography with SiN mask membrane and newly developed high contrast negative resist mr-X (micro resist technology GmbH, Berlin, Germany) enables the cost-effective patterning of sub-micrometer high aspect ratio structures. This work builds [...]
A cantilever beam based memory element is proposed which can trap static charge on a metal plate on the beam. The charge is tunneled to the metal plate from an electrode separated from it by [...]
In this paper we propose a method to measure the system mass and material density of a common type of micro electromechanical systems (MEMS). Measurement can be done on- or off-chip.To examine the feasibility of [...]
The improvement of the functionality of optical fiber devices has always been a research topic. In this regard, coating of optical fibers with metal thin films has been considered as an effective approach. We report [...]
Fetal movement is a significant indication of fetal well-being. Standard clinical fetal monitoring technologies include ultrasound imaging and cardiotocography. Both have limited prognostic value and require many health resources. We have recently developed a low-cost, [...]
In this work we propose a method to measure the structural layer thickness of MEMS using torsional resonance. The thickness of structures often has measurable influences on the mechanical, thermal, and electrical behaviors. Measurement of [...]
A new multifunctional temperature and strain sensor is being investigated. The new sensor is based upon Surface Acoustic Wave (SAW) technology on a Langasite substrate. SAW sensors can be developed that respond to changes in [...]
We generally investigate the use of exchange-biased planar Hall effect bridge (PHEB) magnetic field sensors for biodetection, where the sensors detect the binding and unbinding of magnetic beads to the sensor surface by biomolecular interactions. [...]
MEMS oscillators are now replacing legacy quartz crystal oscillators. They provide higher performance, new features, improved reliability, shorter lead times, and reduced cost. We will present the highest performance MEMS oscillator to date, discussing the [...]
Nanoelectromechanical systems (NEMS) are emerging as strong candidates for a host of important applications in semiconductor-based technology and fundamental science. At this level of miniaturization, the electric characterization of capacitive NEMS is a challenge. In [...]
We propose a surface-mounted MEMS-based health monitoring system. Since MEMS sensors are pervasive but not invasive, they can be deployed in very dense arrays over the whole structure, without affecting its dynamics. With reference to [...]
The Micro Inertial Measurement System (MIMS) is important equipment for micro aircraft and robot. The biases calibration of MEMS gyroscopes and accelerometers are an effective way to reduce measurement error. In according to error mathematical [...]
Local thermal management through silicon microfluidic devices, already under study for possible application in future 3D architectures for high power computing [1,2], is also a good candidate for solving High Energy Physics related issues. It [...]
A novel electrothermal bimorph actuator was designed for low-power (below 300mW), quick-response (below 10ms) switching application. The research work was supported by the Funds for National Key Laboratory (9140C3605101006). Three aspects about the electrothermal bimorph [...]
In this paper we present a lumped electro-thermo-mechanical beam model. Such a model is important for efficiently computing the deflection of an assemblage of mechanical beams that are subject to one or more applied voltages, [...]
In this paper, we present a novel integrated chip of safe and initiation control which is used to initiate explosive or as a ignitor in a fuze. In view of the limits on shape and [...]
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications