A novel electrothermal bimorph actuator was designed for low-power (below 300mW), quick-response (below 10ms) switching application. The research work was supported by the Funds for National Key Laboratory (9140C3605101006). Three aspects about the electrothermal bimorph actuator presents. Firstly, a structural model was established based on the design requirement. Secondly, acorrding to the existing level of the fabrication technology in domestic, the fabrication process flow of the electrothermal bimorph actuator was explained and shown in this paper; Thirdly, multi-physical coupling simulations of the electrothermal bimorph actuator were made, which prove that the device was of low power, quick response and large displacement.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 239 - 242
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications