High density data storage systems utilizing the atomic force microscopy have been developed for a next-generation storage technology. We have reported new fabrication methods of micro tips with contact shadow mask process formed on a [...]
Electromagnetic micro actuators have reached a growing interest in micro technology in addition to commercial applications during the last years. Their basic construction exists of electric conductors and coil systems as well as of soft-magnetic [...]
By suitably harmonically oscillating a clamped-clamped beam immersed in fluid, it is possible to induce nonlinear dynamic behaviour. Singular jump points occur in the frequency response function, the separation of which is dependent on the [...]
, Kim Y.
, Cha M.
, Kim H.
, Kim Y.
, Lee J.
, Lee S.
, Shin J.
, Lee J.
, Lee S.
, Seoul National University, KR
This work deals with ultra-thin metal-based nanomechenical transducers that have potentials for extraordinary sensitivity. This nano membrane transducer (NMT) consists of a flat thin film of gold with 30-60 nm thickness freely suspended over large [...]
Two types of microscale sensors are being developed to take in situ measurements of forces induced during chemical mechanical polishing. Flexible post sensors have been demonstrated, and floating element sensors are under development. Both sensors [...]
Microcantilevers are extremely versatile and are used as sensors, actuators and in many other microsystems. In this work, mathematical model of a microcantilever based actuator, which can be driven by nuclear radiation, is developed. This [...]
Shape memory alloy (SMA) microactuators are under development for use in soft bodied robotics. These actuators take advantage of the shape memory effect of nickel-titanium alloys (nitinol) to deliver high force and large strain in [...]
In this paper, the design and fabrication of a 4x4 hybrid optical switch, which is composed of a MEMS-based silicon micro-mirror array and a mini-actuator array, is presented. The silicon micro-mirror-array structure, which includes vertical [...]
A novel, stacked coupled-disk resonator design is presented where the silicon discs vibrate in radial contour modes, actuated by electrodes wrapped around the disk periphery. The self-aligned, central stem mediates the coupling and also anchors [...]
We show, by measuring the transmission through a phononic crystal (PC) plate, the evidence of the existence of large phononic band gaps (PBGs) in two-dimensional PCs made by a hexagonal (honeycomb) array of holes etched [...]
This study determined changes in cell dielectric properties due to variation of arsenic concentration of the cell suspending medium, from 1 to 150 ppm. An octa-pairs interdigitated electrode was used to induce dielectrophoresis, and the [...]
Printing technology is considered to be a key technology even in the fields of electronics, materials processing, and biotechnology. However there is a genuine need for nano-to-macro integration technology for printing. This paper presents the [...]
Dicing of MEMS contains a host of challenges. Contamination, vibration, thermal, and electrical sensitivity dictate modified or non traditional dicing processes. Focusing a laser beam inside of the silicon substrate creating a modified layer is [...]
Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: June 1, 2008
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications