Papers:
Hierarchical Representation and Simulation of Micromachined Inertial Sensors
A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology 2dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as [...]
Modeling and Characterization of an Integrated FET Accelerometer
The GFET accelerometer is an integrated inertial sensor based on a movable-gate field effect transistor. The complexity of the transduction principle and the tight tolerances associated with its manufacture necessitated a large range of simulation [...]
Micromachined Accelerometer Design, Modeling and Validation
Davies B.R., Bateman V.I., Brown F.A., Montague S., Murray J.R., Rey D., Smith J.H., Sandia National Laboratories, US
Micromachining technologies enable the development of low-cosr devices capable of sensing motion in a reliable and accurate manner. The development of various surface micromachined accelerometers and gyroscopes to sense motion is an ongoing activity at [...]
On the Vibrations of a MEMS Gyroscope
In this paper, the dynamics of a dual-axis MEMS gyroscope are examined. The model for the device is based on a non-linear rod theory developed by A. E. Green, P. M. Naghdi and several co-workers. [...]
Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm
Finite-Element-Methods (FEM) has been used to study the behavior of a non-planar composite diaphragm, which is to be used in a tunable Fabry-Perot-based silicon microinterferometer. The composite (Ag-mirrorAow-stress SiN membrane/Si-frame) diaphragm used exhibits: excellent flatness, [...]
Dynamic Effects of Linkage Joints in Electrostatic Microengines
The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must [...]
An Integrated Pressure Sensor with High Performance
A bipolar integrated pressure sensor had been designed and simulated. The ion-implanted resistors with temperature coeffcient of 1700pm/?C and 4700ppm/?C were used for calibration and temperature compensation. Ion-implanted resistors are simultaneouslv fabricated with base and [...]
Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives
A methodology for solving inverse problems in Microelectromechanical (MEM) systems is proposed in this paper. Design of variable shape electrostatic comb drives (shape motors), in order to obtain desired force profiles, is presented as an [...]
Simulation of Silicon Piezoresistive Sensors
The temperature infiuence of the heavy doped silicon piezoresistive sensors is simulated. In this simulation, the density of state functions for impurity band and band edge tail are taken into account for carrier and ionized [...]
Finite Element Analysis of MEMS Diaphragm Valves
Based on simple plate theory, the deflection of MEMS microvalve is studied analytically and numerically. The critical load to initially drive the microvalve is found to be proportional to the pre-deflection of microdiaphragm. The microdiaphragm [...]
Robust Design of Silicon Piezoresistive Pressure Sensors
In order to analyze silicon piezoresistive pressure sensors, several methods are used to obtain the stress distribution for different sizes and config,urations of square diaphragm type silicon pressure sensors. Furthermore, through integral considerations and thoughtful [...]
Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application
The work on this paper focuses on the design of high accuracy and high performance of positioning tracking controller of th. Hybrid stepper system (HSM). realized for the application of direct drive robot (DDR). The [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-96661-35-0-3