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Home2007May

Month: May 2007

TechConnect Proceedings Papers

Angular Orientation-Specific Directed Self-assembly Enabling the Integration of Small Dies

Knuesel R.J., Bose S., Zheng W., Jacobs H.O., University of Minnesota, US
We report on recent progress in the directed self-assembly of discrete high performance semiconductor device components. Different from prior research, the goal is to enable the integration of ultra small dies (10-100 micrometer in size) [...]

Development of Materials and Sensors for the U.S. Army’s Active Coatings Technology Program

Zunino III J.L., U.S. Army ARDEC, US
The ability to custom build and integrate novel technologies into functionalized systems is the driving force towards the creation and advancement of active coatings systems. Active coating systems require the development and advancement of numerous [...]

Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

Jakovenko J., Husak M., Lalinsky T., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ
In this report we demonstrate the design of new GaAs based Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem. Transmitted power is the main quantity measured in RF systems. The [...]

Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector

Tang H-K, Tseng F-C, Wang W.W., Lee C-K, Lee I.Y., Lee K., Lee C-K, Lee I.Y., Lee K., Lee C-K, Lee I.Y., Lee K., BenQ Corporation, TW
In this paper, the methodology of design optimization to achieve optimal thermal efficiency of a twin bubble MEMS micro-injector is reported. This twin bubble back shooting structure can reduce the problems of crosstalk and satellite [...]

FEM Simulation for demolding process in thermal imprint lithography

Song Z., Lee J., Park S., Louisiana State University, US
Thermal imprint lithography is a highly potential technique utilizing molding to produce micro- and nano-structures with high throughput and at low cost. Extensive researches have been performed in understanding polymer flow behavior and cavity filling [...]

Genetic Algorithm for the Design of Microchip Flow Cytometers

Bang H., Lee W.G., Yun H., Min J.K., Chung C., Chang J.K., Han D-C, Seoul National University, KR
Robot designers and artificial-intelligence researchers have long been inspired by living things. Now, we are trying to mimic some of the most fundamental features of life while designing micro devices. In this paper we proved [...]

A Method for Semi-Automated Modeling of Analog-Mixed Signal Systems in Automotive Applications based on Transient Simulation Data

Mielenz H., Doelling R., Rosenstiel W., Robert Bosch Group, DE
Functional verification by simulation is an important step during the development of present microelectronic solutions for automotive applications. Its relevance is based on the capability to compare the behavior of a developed circuit with its [...]

A Study on the Electrical Properties of Plasma Nitrided Oxide Gate Dielectric in Flash Memory

Park M., Suh K., Lee S., Kang H., Kim K., Kim K., Samsung Electronics, KR
In this paper, we address the effect of Plasma Nitridation on the gate dielectric by a combined experimental and simulation study of gate oxidation. Firstly, Boron segregation at the Si/SiO2 interface is experimentally characterized by [...]

Optimization of Masks for High Aspect Ration UV-Lithographic Patterning

Triltsch U., Büttgenbach S., Technische Universität Braunschweig, DE
The increasing complexity of micro actuators and micro sensors (e.g. electroplated micro coils, flux guidances, insulation and planarization layers) make new fabrication technologies and materials inevitable. For such purposes thick-film photo resists like SU-8 or [...]

Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators

Sahai T., Zehnder A.T., Cornell University, US
In this work we analyze a feasible approach for constructing coupled micromechanical oscillators that synchronize. For this purpose we use dome shaped micro-oscillators that have previously been used to build radios. These oscillators are fabricated [...]

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