TechConnect Proceedings Papers
IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes
A method for solving design problems involving coupled-field physics is presented: it is demonstrated in the case of the electrostatic actuation of a deformable micro-mirror. The focus of the present paper is on the inversion [...]