Electromechanical Model for a Single Port Nano-Mechancial Beam Resonator

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A simple electromechanical model for a nano-mechanical, magneto-motively driven beam resonator is derived. The model is developed in order to determine the dynamic electrical properties of the resonator. This enables the pickoff and drive electronics to be matched to the resonator performance. The model is based on a lumped parameter approach using an equivalent electrical circuit.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 610 - 612
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9767985-2-2