Papers – Page 18 – TechConnect Briefs

Optimization of Integrated Magnetic Field Sensors

Lienemann J., Greiner A., Korvink J.G., Sigmund O., Albert Ludwig University, DE

We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given [...]

The Coupled-Domain System Simulation/Simulatability Problem

Jopling J., Rose D., Fair R.B., Duke University, US

This paper discusses the diculties in current approaches to modeling and simulation of coupled-domain systems and presents new approaches and solutions to simulation execution and the model-simulation gap. The ongoing paradigm shift toward coupled-domain systems [...]

Efficient Simulation of MEMS Using Element Stamps

Casinovi G., Georgia Institute of Technology, US

This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into [...]

Challenges in CMOS-MEMS Extraction

Baidya B., Mukherjee T., Carnegie Mellon University, US

CMOS micromachining processes are being increasingly used to fabricate integrated MEMS devices. Verification of such designs requires extraction from layout to mixed domain circuits and MEMS schematics for lumped parameter simulation. The higher etch hole [...]

Closed Loop Micromachined Inertial Sensors with Higher Order SD-Modulators

Kraft M., Redman-White W., Mokhtari M.E., University of Southampton, UK

Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (SDM) type control structure. The order [...]

Comparison of Two Novel Control Strategies for a Closed Loop Micromachined Tunnelling Accelerometer

Gaura E., Kraft M., Coventry University, UK

This paper presents system level modelling and simulations results of two closed loop, force-feedback control strategies for micromachined tunnelling accelerometers. The first approach is based on the incorporation of the sensing element in a sigma-delta [...]

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

Veijola T., Helsinki University of Technology, FI

Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the [...]

Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme

Schrag G., Voigt P., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also [...]

Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams

Iyer S., Lakdawala H., Fedder G.K., Mukherjee T., Carnegie Mellon University, US

Temperature sensitive curling is commonly observed in MEMS structures fabricated using a standard CMOS pro-cess. In this paper, a macromodel for vertical and lateral curling effects is derived by extending thermal multimorph theory for cantilever [...]

Boundary Independent Exact Thermal Model for Electronic Systems

Gerstenmaier Y.C., Pape H., Wachutka G., Siemens AG, Corporate Technology, DE

A compact thermal model is presented, which describes the hot spot (junction) temperatures and contact heat flows of electronic packages or systems in the stationary state. The model is exact provided that the underlying heat [...]