MEMS & NEMS Devices, Modeling & Applications – Page 62

Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms

Chen J., Liu L., Li Z., Liu L., Tsinghua University, CN

Novel single-chip fabricated condenser structures with corrugated diaphragms for residual stress releasing have been proposed and simulated. An electrostatic-structural coupling FEM analysis has been performed to fully reveal the nonlinear relationship of output electrical signal [...]

Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor

Innocent M., Wambacq P., Donnay S., Tilmans H., Engels M., DeMan H., Sansen W., IMEC, BE

Today’s wireless communication systems often require a high linearity for the RF building blocks. One of these blocks can be a tunable LC filter using MEMS variable capacitors (varicaps). In these filters, the varicaps are [...]

Snap-Through Bilayer Microbeam

Cabal A., Ross D.S., Eastman Kodak Company, US

In this paper, we describe our theoretical investigations of snap-through bilayer microbeams. We use a mathematical model that we devised to investigate the nonmonotone dependence of the vibrational frequency of such beams on temperature. The [...]

Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors

Wang W.J., Lin R.M., Nanyang Technological, SG

In this paper, we report on a novel optical cross-connect switch architecture based on MEMS vertical mirrors. The switch consists of a pair of MEMS mirror arrays to redirect optical beams from an input fiber [...]

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Jianqiang M., Shixin C., Yi L., Boon Buan L., Data Storage Institute, SG

Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical [...]

Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS

Jorgensen C., Melander D., Schmidt R., Plimpton S., Sandia National Laboratories, US

This paper describes a successful approach to improving the robustness and speed of Sandia National Laboratory’s 3-D MEMS geometry modeler through a combination of mask subdivision and code parallelization. Symptoms of the robustness problems experienced [...]

MEMS Applications and Characterization

Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries

Yen P-C, Yang Y-J, National Taiwan University, TW

A methodology of generating time-domain reduced-order models of viscous lateral damping effects for microsystems is presented. A three-dimensional finite-difference-method (FDM) Stokes flow solver was developed and verified. The system matrices generate by the solver were [...]

Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope

Iyer S., Mukherjee T., Carnegie Mellon University, US

This paper uses MEMS circuit-level simulation to correlate gyro performance measures such as zero rate output (ZRO), linear acceleration sensitivity (Sa) and cross-axis sensitivity (Sca) to geometrical asymmetries. Elastic and electrostatic asymmetries in the gyroscope [...]

Dispersion Modeling in Microfluidic Channels for System-level Optimization

Baidya B., Mukherjee T., Hoburg J.F., Carnegie Mellon University, US

Chip-based microfluidic separation systems often use serpentine channels to achieve long separation lengths in minimal area. Such designs suffer from the ‘racetrack’ effect due to the bends in the microchannel. In addition, the skew produced [...]