MEMS & NEMS Devices, Modeling & Applications – Page 26

Stacked Coupled-Disk MEMS Resonators for RF Applications

Nygaard K.H., Grinde C., Fjeldly T.A., Norwegian University of Science and Technology, NO

A novel, stacked coupled-disk resonator design is presented where the silicon discs vibrate in radial contour modes, actuated by electrodes wrapped around the disk periphery. The self-aligned, central stem mediates the coupling and also anchors [...]

Development of A 4X4 Hybrid Optical Switch

Liao B.T., Yang Y-J, National Taiwan University, TW

In this paper, the design and fabrication of a 4x4 hybrid optical switch, which is composed of a MEMS-based silicon micro-mirror array and a mini-actuator array, is presented. The silicon micro-mirror-array structure, which includes vertical [...]

Shape Memory Alloy and Elastomer Composite MEMS Actuators

Fallon P.D., Gerratt A.P., Kierstead B.P., White R.D., Tufts University, US

Shape memory alloy (SMA) microactuators are under development for use in soft bodied robotics. These actuators take advantage of the shape memory effect of nickel-titanium alloys (nitinol) to deliver high force and large strain in [...]

Modeling of Microcantilever based Nuclear Microbatteries

Sheeparamatti B.G., Sheeparamatti R.B., Kadadevarmath J.S., Sheeparamatti B.G., Sheeparamatti R.B., Basaveshwar Engineering College, IN

Microcantilevers are extremely versatile and are used as sensors, actuators and in many other microsystems. In this work, mathematical model of a microcantilever based actuator, which can be driven by nuclear radiation, is developed. This [...]

Micromachined Force Sensors for Characterization of Chemical Mechanical Polishing

Gauthier D., Mueller A., White R., Manno V., Rogers C., Anjur S., Moinpour M., Tufts University, US

Two types of microscale sensors are being developed to take in situ measurements of forces induced during chemical mechanical polishing. Flexible post sensors have been demonstrated, and floating element sensors are under development. Both sensors [...]

Ultra-thin gold membrane transducer

Kim H., Kim Y., Cha M., Kim H., Kim Y., Lee J., Lee S., Shin J., Lee J., Lee S., Seoul National University, KR

This work deals with ultra-thin metal-based nanomechenical transducers that have potentials for extraordinary sensitivity. This nano membrane transducer (NMT) consists of a flat thin film of gold with 30-60 nm thickness freely suspended over large [...]

A novel high-sensitivity resonant viscometer realised through the exploitation of nonlinear dynamic behaviour

Waugh W.H., Gallacher B.J., Burdess J.S., Newcastle University, UK

By suitably harmonically oscillating a clamped-clamped beam immersed in fluid, it is possible to induce nonlinear dynamic behaviour. Singular jump points occur in the frequency response function, the separation of which is dependent on the [...]

Novel synchronous linear and rotatory micro motors based on polymer magnets with organic and inorganic insulation layers

Feldmann M., Waldschik A., Büttgenbach S., Institut for Microtechnology (IMT), DE

Electromagnetic micro actuators have reached a growing interest in micro technology in addition to commercial applications during the last years. Their basic construction exists of electric conductors and coil systems as well as of soft-magnetic [...]

Micro-Tip Assembled Metal Cantilevers with Bi-Directional Controlability

Kwon H., Nakada M., Hirabayashi Y., Higo A., Ataka M., Fujita H., Toshiyoshi H., KAST, JP

High density data storage systems utilizing the atomic force microscopy have been developed for a next-generation storage technology. We have reported new fabrication methods of micro tips with contact shadow mask process formed on a [...]