MEMS & NEMS Devices, Modeling & Applications – Page 25

Nanocomposite Contact Material for MEMS Switches

Ding C., MacDonald N.C., university of california, santa barbara, US

This work reports the development of a nanostructured composite contact material for improving the contact reliability of MEMS switches. The nanocomposite material was integrated into a bulk titanium MEMS (BT-MEMS) switch which was fabricated using [...]

Pneumatically driven Auxiliary Micro Tools for Desktop Factories

Hoxhold B., Büttgenbach S., Technische Universität Braunschweig, DE

This paper presents the design and the fabrication process of two novel pneumatically driven auxiliary micro tools that can be used to improve and to speed up assembling processes in desktop factories. The described micro [...]

Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization

Je S.-S., Kim J., Kozicki M.N., Chae J., Arizona State University, US

We present an in-situ non-electronic method for MEMS (Micro-Electro-Mechanical-Systems) microphone optimization by sensitivity adjustment via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits [...]

The Design, Fabrication and Characterization of A Novel Miniature Silicon Microphone Diaphragm

Cui W., Miles R.N., Su Q., State University of New York at Binghamton, US

A novel miniature silicon microphone diaphragm is described that is highly robust when subjected to stresses that may arise during the fabrication process. Residual stress produces major challenges in the fabrication of MEMS devices. This [...]

Advancement of Prototyping and Fabrication Techniques for Active Sensors and Microelectronics

Zunino J.L., Skelton D.R., U.S. Army ARDEC, US

U.S. Army ARDEC is developing the ability to custom design and integrate novel technologies into functional systems for the creation and advancement of active systems. This research being performed will directly and indirectly support the [...]

MEMS and NEMS

Non traditional dicing of MEMS devices

Sullivan S., Yoshikawa T., DISCO Corp., JP

Dicing of MEMS contains a host of challenges. Contamination, vibration, thermal, and electrical sensitivity dictate modified or non traditional dicing processes. Focusing a laser beam inside of the silicon substrate creating a modified layer is [...]

Fabrication of nanoscale nozzle for electrostatic field induced inkjet head and test of drop-on-demand operation

Nguyen V.D., Byun D., Bui S., Tran Q., Schrlau M., Bau H.H., Lee S., Konkuk University, KR

Printing technology is considered to be a key technology even in the fields of electronics, materials processing, and biotechnology. However there is a genuine need for nano-to-macro integration technology for printing. This paper presents the [...]

Detection of Plant Cell Compartments and Changes in Cell Dielectric due to Arsenic Absorption via Traveling Wave Dielectrophoresis

Bunthawin S., Wanichapichart P., Tuantranont A., Membrane Science and Technology Research Center, TH

This study determined changes in cell dielectric properties due to variation of arsenic concentration of the cell suspending medium, from 1 to 150 ppm. An octa-pairs interdigitated electrode was used to induce dielectrophoresis, and the [...]

Evidence of the Existence of Complete Phononic Band Gaps in Phononic Crystal Plates

Mohammadi S., Eftekhar A.A., Khelif A., Hunt W.D., Adibi A., Georgia Institute of Technology, US

We show, by measuring the transmission through a phononic crystal (PC) plate, the evidence of the existence of large phononic band gaps (PBGs) in two-dimensional PCs made by a hexagonal (honeycomb) array of holes etched [...]