MEMS & NEMS Devices, Modeling & Applications – Page 15

A MEMS-type Micro Sensor for Hydrogen Gas Detection

Yoon J-H, Kim B.-J., Kim J-S, Kim B.-J., Kim J-S, University of Seoul, KR

In this study, a highly sensitive hydrogen gas sensor of the multi-layer and micro-heater type was designed and fabricated using a microelectromechanical system (MEMS) process. The dimension of fabricated hydrogen gas sensor was 5 mm×4 [...]

NH3 sensing properties of centimeter scaled CVD graphene in ambient condition

Lim J., Anoop R., Kim J.H., Kim Y.J., Yoon J., Ahn H-R, Song S., Kim J.H., Kim Y.J., Jun S.C., Yonsei University, KR

The present work reports ammonia (NH3) gas sensing properties of Graphene film synthesized by chemical vapor deposition (CVD) in ambient condition. Graphene with a large area is synthesized on Cu foils by chemical vapor deposition [...]

Thermal-managed sputtered micro machined gas chromatography columns for oilfield applications

Haudebourg R., Vial J., Thiébaut D., Sassiat P., Azzouz I., Danaie K., Bourlon B., Schlumberger, FR

Since the late 70s, new approaches have been proposed to replace conventional gas chromatograph apparatus by silicon based micro fabricated separation systems. The main challenge in miniaturized gas chromatography consists in the reproducible and collective [...]

Gas sensor device based on a SnO2 nanowire network for increased sensing performances

Brunet E., Mutinati G.C., Steinhauer S., Koeck A., AIT Austrian Institute of Technology GmbH, AT

A novel gas sensor device based on a network of tin dioxide (SnO2) nanowires is presented. The high surface-to-volume ratio presented by the network of ultralong nanowires enables increased gas sensing performances in comparison to [...]

MEMS & NEMS Devices & Applications

Comb Finger Capacitive Micro Wind Senor

Zhao Z., Han Y., Du L., Fang Z., Wang X., Institute of Electronics,CAS, CN

This paper reports a novel micro wind sensor with comb finger shaped structure based on MEMS technology and capacitive sensing principle, which can measure wind speed and direction simultaneously. The proposed sensor was theoretically analyzed [...]

Calibrating the AFM with Self-Calibratable MEMS: A Theoretical Study

Li F., Clark J.V., Purdue University, US

To perform reliable scientific measurements with the atomic force microscope (AFM), it is important to calibrate the AFM cantilever. Conventional calibration methods have a 10 to 15% uncertainty, and the accuracies of such methods are [...]

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology

Qu P., Oakland University, US

As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. [...]

Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection

Lin P-Y, Cheng Y-J, Kuan S., Huang L-S., National Tainwan University, TW

Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible [...]

Weak Magnetic Fields Sensing Using Soft Ferrite Nanoparticles and MEMS

Lyshevski S.E., Rochester Institute of Technology, US

We perform the feasibility analysis of sensing weak magnetic fields by using soft ferrite nanoparticles embedded in molecular complexes. The sensing mechanisms are based on the deflection of molecular complexes and induced strain due to [...]