MEMS & NEMS Devices, Modeling & Applications – Page 14

Novel MEMS-Based Diffractive Spatial Light Modulator

Woo H., Li S., Cable A.J., Light Blue Optics, Inc., US

This research addresses the development of a unique pixellated diffractive phase spatial light modulator (SLM) that is monolithically integrated onto a CMOS backplane to enable extremely energy-efficient video projection systems suitable for consumer electronics and [...]

An optofluidic device for characterizing the effect of viscosity and density on mass transfer

Lapsley M.I., Nama N., Yazdi S., Huang T.J., Pennsylvania State University, US

In this study, we developed an optofluidic device for analyzing the mass transfer of materials in a microfluidic channel. This device uses refractometry to monitor concentration in contrast to typical methods which use florescent markers. [...]

MEMS Based AC Voltage References Toward Metrological Applications

Camon H., Bounouh A., Blard F., Bélières D., LAAS/CNRS, FR

In electrical references, if primary references define the international standards, secondary references are the key points for precision measurement or electrical conversion. The principle of secondary AC voltage references based on MEMS using the pull-in [...]

Novel three-dimensional porous film for single-cell microarray applications

Ranjan S., Yong Z., National University of Singapore, SG

Cell-based studies yield data averaged over a large number of cells which overlook the rich information that can possibly be obtained when cells are studied individually. For this reason, much emphasis has been placed over [...]

High Performance Sputtered PZT Film for MEMS applications

Hishinuma Y., Li Y., Birkmeyer J., Fujii T., Naono T., Arakawa T., FUJIFILM Dimatix, US

We have developed a method of forming PZT films on silicon substrates with a high piezoelectric coefficient using RF sputtering. Films have been formed on 6 inch wafers with thickness variation of less than +/-5% [...]

Effect of CuO/water nanofluid in the enhancement of convective heat transfer for electronic cooling

Selvakumar P., Suresh S., National Institute of Technology, Tiruchirappalli, IN

In this work CuO nanoparticles are synthesized using sol gel technique and water based nano fluids of two different volume concentrations are prepared. Thermal conductivity and viscosity are measured. A copper heat sink having rectangular [...]

Electrical Nerve Agents Sensors Based on Chemically Functionalized Nanomaterials

Simonato J-P, CEA, FR

The threat of a chemical attack continues to grow and recent examples such as the terrorist attack of the Metro of Tokyo have shown that organophosphorus agents (OPs) are powerful neurotoxic weapons. There is still [...]

In situ monitoring of temperature and voltage in lithium-ion rechargeable batteries using flexible micro two-in-one sensors

Lee C.-Y., Lee S.J., Lee C.-Y., Lee S.J., Tang M-S, Chen P-C, Chang Y-M, Yuan Ze University, TW

Under overcharge conditions, the interior temperature of polymer lithium-ion rechargeable batteries will rapidly increase. Such batteries are adopted in electric vehicles that require rapid charging and discharging, and this process causes rapid heating, raising safety [...]

MEMS Strain Sensors with High Linearity and Sensitivity with an Enhanced Strain Transfer Mechanism for Wind Turbine Blades

Moradi M., Sivoththaman S., University of Waterloo, CA

A new physical sensor design for strain measurement for wind turbine blades is presented. While the proposed sensors are highly sensitive, they are based on simple operating principle: application of an input force, which is [...]

3D Electrostatic Energy Harvester

Janicek V., Husak M., Formanek J., Jakovenko J., FEE CTU in Prague, CZ

This paper discusses the design, optimization, simulation and fabrication of 3D electrostatic MEMS energy harvester. It is one part of self-powered microsystem. It is able to work in all 3 axis which increases the efficiency. [...]