Sensors, MEMS, Electronics – Page 379

Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM

Lee H.J., Crary S.B., Affour B, Bernstein D., Gianchandani Y.B., Woodcock D.M., Maher M.A., MEMSCAP S.A., FR

We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]

Integration of a Permeable Layer into Micro Coil Modelling and First Steps of Automatic Optimization

Rehfuß S., Peters D., Laur R., University of Bremen (ITEM), DE

Rectangular micro coils which are used in a wide range of applications (e.g. medical or automotive area) are the main components of appropriate wireless transmission systems for frequencies up to 20 MHz. As shown in [...]

Investigation of Cross-Coupling and Parasitic Effects in Microelectromechanical Devices on Device and System Level

Schrag G., Zelder G., Wachutka G., Münich University of Technology, DE

With progressing monolithic integration of entire micro-electromechanical systems on one chip fabricated by standard IC technology we have to cope with the problem that the operation of embedded transducer elements is considerably affected by cross-coupling [...]

An Improved BDJ Photodetector Physical Model Implemented Under SPICE

Alexandre A., BenChouikha M., Sedjil M., Alquié G., Université Pierre et Marie Curie, FR

The physical model of the BDJ photo-detector is evaluated by comparing experimental results with simulations. The model is then improved using a parameter extraction method and by calculating the oxide layer effects. Finally the result [...]

Development of an FET Pressure Sensor Model and used to Predict Sensor Behaviour as a Function of Electrode Geometry

Hynes E., Elebert P., O'Neill M., Berney H., Lane W.A., Kelly G., Hill M., Analog Devices, IR

This paper presents the development and solution of a model to describe the behaviour of a surface micromachined FET pressure sensor. Initially an expression is developed to describe the radial deflection of the sensing diaphragm [...]

Equivalent Circuits, Behavioral and Multi-Level Simulation

Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

Xie H., Erdman L., Jing Q., Fedder G.K., Carnegie Mellon University, US

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis [...]

Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators

Chen Y., Shroff Y., Oldham W.G., University of California, US

The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices [1]. Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape [...]

Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications

Mohamed A., Elsimary H., Ismail M., Ohio State University, US

In this work a new design of a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q- tunable capacitor has been accomplished through bulk micromachining process with all metal [...]

HDL-A-Model of a Micromachined Tuning Fork Gyroscope

Eichholz J., Quenzer J., Schwarzelbach O., Weiß M., Wenk B., FhG-ISIT, DE

The HDLA-model presented describes the electrical and mechanical behavior of a micromachined silicon tuning fork gyroscope. This gyro will be excited by electrostatic forces and the Coriolis induced torsion motion will be read out capacitively. [...]