The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices . Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape has been studied recently [2, 3]. However, it is desirable to further improve the transient performance by electrical or mechanical means. For this purpose, we present a simple electrical phase-lead compensator and a novel shape design of the comb drive (a mechanical phase-lead compensator). Both of them will increase the modulation force impulse to the actuator at the initial stage with little influence on the behavior at the later (settling) stage. Numerical simulation is carried out to show that the rise time can be reduced.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 178 - 180
Industry sector: Sensors, MEMS, Electronics
Topicss: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems