This paper presents the development and solution of a model to describe the behaviour of a surface micromachined FET pressure sensor. Initially an expression is developed to describe the radial deflection of the sensing diaphragm [...]
The physical model of the BDJ photo-detector is evaluated by comparing experimental results with simulations. The model is then improved using a parameter extraction method and by calculating the oxide layer effects. Finally the result [...]
With progressing monolithic integration of entire micro-electromechanical systems on one chip fabricated by standard IC technology we have to cope with the problem that the operation of embedded transducer elements is considerably affected by cross-coupling [...]
Rectangular micro coils which are used in a wide range of applications (e.g. medical or automotive area) are the main components of appropriate wireless transmission systems for frequencies up to 20 MHz. As shown in [...]
We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]
MEMS applications are frequently thermally operated, so knowing the thermal characteristics of their packages is very important. This paper presents a method for the generation of reduced order dynamic thermal models, either from simulated or [...]
This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly [...]
, Kiihamäki J.
, Lamminmäki T.
, Mattila T.
, Oja A.
, Ruokonen K.
, Seppä H.
, Seppälä P.
, Tittonen I.
, Helsinki University of Technology, FI
In this paper, finite element method (FEM) simulations are used to model mechanical properties of MEMS resonators. Using a static displacement analysis the effective spring constant and mass are calculated. Non-linearity of the mechanical restoring [...]
The paper proposes a new computational approach for analyzing miniaturized electromagnetic devices. This approach is based on a general structure of an equivalent network for the coupled electromagnetic problem. It enables automated derivation of the [...]
This paper presents a synthesizable low power VHDL model of a three-dimensional hyperbolic positioning system algorithm. The algorithm derives the equations needed to obtain an exact solution for the three dimensional location of a mobile [...]
Smart Pixels with Smart Illumination (SPSI) is a recently developed technology that enables the monolithic integration of two functionalities-optical illumination and detection- into arrays of optoelectronic ‘pixels’ in a compact and robust manner. To facilitate [...]
In this paper we present a hardware realization of a simplified blood-pressure regulation mechanism. The mechanism has been proposed and then modeled by using Hardware Description Language (VHDL). After verifying the simulation results, Computer Aided [...]
CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems