Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications

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In this work a new design of a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q- tunable capacitor has been accomplished through bulk micromachining process with all metal microstructure. A standard IC fabrication process (HP.5m) is used to carry out the tunable capacitor. The main features of this high-Q MEMS tunable capacitor is the enabling of a complete monolithic fabrication of RF VCOs using on-chip IC compatible devices. Simulation results are presented to show the MEMS capacitor performance when used in RF VCO circuit. The tunable capacitor shows a high-Q of about 60 at 950 MHz of the VCO oscillating frequency.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 174 - 177
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0