The HDLA-model presented describes the electrical and mechanical behavior of a micromachined silicon tuning fork gyroscope. This gyro will be excited by electrostatic forces and the Coriolis induced torsion motion will be read out capacitively. To control the behavior of the gyro several control nodes are available. In addition the model includes capacitors for a force feedback operation and for tuning of the torsional resonance frequency. The design of the element is described by 25 mechanical parameters. Verification of the model is done by developing concurrently a mathematical model that solves the differential equations. In addition the simulations are compared with measurement results. The model can be used for operation point analysis, transient and frequency simulations.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 170 - 173
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems