TechConnect Proceedings Papers
Micromachined Nanocrystalline Silver Doped Tin Oxide Hydrogen Sulfide Sensor
We report here an ultra high sensitive micromachined hydrogen sulfide gas sensor with nanocrystalline thin (100nm) silver doped SnO2 film. A polymeric sol-gel process has been successfully developed in fabricating the thin SnO2 nanofilm as [...]