RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors

Salomonsson A., Roy S., Aulin C., Ojamäe L., Käll P.-O., Strand M., Sanati M., Lloyd Spetz A.
IFM, SE

Keywords: C(V) catalytically active nanoparticles, Ru, RuO2, SiC-FET

Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: May 8, 2005
Pages: 269 - 272
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Nanoelectronics
ISBN: 0-9767985-1-4