Papers – Page 702 – TechConnect Briefs

Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

Jakovenko J., Husak M., Lalinsky T., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ

In this report we demonstrate the design of new GaAs based Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem. Transmitted power is the main quantity measured in RF systems. The [...]

Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector

Tang H-K, Tseng F-C, Wang W.W., Lee C-K, Lee I.Y., Lee K., Lee C-K, Lee I.Y., Lee K., Lee C-K, Lee I.Y., Lee K., BenQ Corporation, TW

In this paper, the methodology of design optimization to achieve optimal thermal efficiency of a twin bubble MEMS micro-injector is reported. This twin bubble back shooting structure can reduce the problems of crosstalk and satellite [...]

FEM Simulation for demolding process in thermal imprint lithography

Song Z., Lee J., Park S., Louisiana State University, US

Thermal imprint lithography is a highly potential technique utilizing molding to produce micro- and nano-structures with high throughput and at low cost. Extensive researches have been performed in understanding polymer flow behavior and cavity filling [...]

Genetic Algorithm for the Design of Microchip Flow Cytometers

Bang H., Lee W.G., Yun H., Min J.K., Chung C., Chang J.K., Han D-C, Seoul National University, KR

Robot designers and artificial-intelligence researchers have long been inspired by living things. Now, we are trying to mimic some of the most fundamental features of life while designing micro devices. In this paper we proved [...]

A Method for Semi-Automated Modeling of Analog-Mixed Signal Systems in Automotive Applications based on Transient Simulation Data

Mielenz H., Doelling R., Rosenstiel W., Robert Bosch Group, DE

Functional verification by simulation is an important step during the development of present microelectronic solutions for automotive applications. Its relevance is based on the capability to compare the behavior of a developed circuit with its [...]

A Study on the Electrical Properties of Plasma Nitrided Oxide Gate Dielectric in Flash Memory

Park M., Suh K., Lee S., Kang H., Kim K., Kim K., Samsung Electronics, KR

In this paper, we address the effect of Plasma Nitridation on the gate dielectric by a combined experimental and simulation study of gate oxidation. Firstly, Boron segregation at the Si/SiO2 interface is experimentally characterized by [...]

Optimization of Masks for High Aspect Ration UV-Lithographic Patterning

Triltsch U., Büttgenbach S., Technische Universität Braunschweig, DE

The increasing complexity of micro actuators and micro sensors (e.g. electroplated micro coils, flux guidances, insulation and planarization layers) make new fabrication technologies and materials inevitable. For such purposes thick-film photo resists like SU-8 or [...]

Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators

Sahai T., Zehnder A.T., Cornell University, US

In this work we analyze a feasible approach for constructing coupled micromechanical oscillators that synchronize. For this purpose we use dome shaped micro-oscillators that have previously been used to build radios. These oscillators are fabricated [...]

Frequency Domain Modeling of SAW Devices

Wilson W.C., Atkinson G.M., NASA Langley Research Center, US

The lack of integrated design tools for MEMS devices in general, and for Surface Acoustic Wave (SAW) devices specifically, has led to the development of tools that will enable integrated design, modeling, simulation, analysis and [...]

New Analysis Method for Coupled-Field Micro Devices

Motiee M., Khajepour A., Mansour R.R., University of Waterloo, CA

MEMS actuators are typically used for either one time deployment of structures for automatic assembly or constant periodic actuation as in case of micro optic scanners. Electro-thermal actuators rely on the joule heating resulting small [...]