Papers – Page 1026 – TechConnect Briefs

Investigation of Cross-Coupling and Parasitic Effects in Microelectromechanical Devices on Device and System Level

Schrag G., Zelder G., Wachutka G., Münich University of Technology, DE

With progressing monolithic integration of entire micro-electromechanical systems on one chip fabricated by standard IC technology we have to cope with the problem that the operation of embedded transducer elements is considerably affected by cross-coupling [...]

An Improved BDJ Photodetector Physical Model Implemented Under SPICE

Alexandre A., BenChouikha M., Sedjil M., Alquié G., Université Pierre et Marie Curie, FR

The physical model of the BDJ photo-detector is evaluated by comparing experimental results with simulations. The model is then improved using a parameter extraction method and by calculating the oxide layer effects. Finally the result [...]

Development of an FET Pressure Sensor Model and used to Predict Sensor Behaviour as a Function of Electrode Geometry

Hynes E., Elebert P., O'Neill M., Berney H., Lane W.A., Kelly G., Hill M., Analog Devices, IR

This paper presents the development and solution of a model to describe the behaviour of a surface micromachined FET pressure sensor. Initially an expression is developed to describe the radial deflection of the sensing diaphragm [...]

Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

Xie H., Erdman L., Jing Q., Fedder G.K., Carnegie Mellon University, US

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis [...]

Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators

Chen Y., Shroff Y., Oldham W.G., University of California, US

The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices [1]. Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape [...]

Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications

Mohamed A., Elsimary H., Ismail M., Ohio State University, US

In this work a new design of a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q- tunable capacitor has been accomplished through bulk micromachining process with all metal [...]

HDL-A-Model of a Micromachined Tuning Fork Gyroscope

Eichholz J., Quenzer J., Schwarzelbach O., Weiß M., Wenk B., FhG-ISIT, DE

The HDLA-model presented describes the electrical and mechanical behavior of a micromachined silicon tuning fork gyroscope. This gyro will be excited by electrostatic forces and the Coriolis induced torsion motion will be read out capacitively. [...]

Modeling and Optimization of Bi-stable Optical Switch

Maekoba H., Helin P., Reyne G., Bourouina T., Fujita H., Cybernet Systems Co. Ltd., JP

High performance silicon-based, micro-optical switch are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure [...]

Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects

Veijola T., Helsinki University of Technology, FI

Compact models for the viscous damping coefficient in narrow air gaps between laterally moving structures are reported. The gas rarefaction effects are included in these small-displacement models. In the first part of the paper, a [...]

Investigation of the Dynamics of Microdevices – As a Design Tool

Seter D.J., Degani O., Kaldor S., Scher E., Nemirovsky Y., RAFAEL Microsystems Group, IL

When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a [...]