NEMS – TechConnect Briefs

Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications

Dekkers M., Solmates BV, NL

It is well known that Pulsed Laser Deposition (PLD) is a very flexible and versatile technique allowing fast optimization of new and complex material thin films. The unique features of PLD allow for the integration [...]

Freestanding Membranes of Cross-Linked Gold-Nanoparticles: Novel Functional Material for MEMS/NEMS Applications

Schlicke H., Schröter C.J., Rebber M., Battista D., Kunze S., Vossmeyer T., University of Hamburg, DE

We present the focus of our current research, which is the investigation of the electronic and mechanical properties of freestanding gold nanoparticle (GNP) membranes, e.g. by micro bulge tests with atomic force microscopy (AFM) data [...]

Towards generic platforms for MEMS manufacturing

Rouzaud A., Polizzi JP., Robert P., Arcamone J., CEA-LETI, FR

Coming at the time of technical maturity, MEMS industry requires now more standardization in manufacturing processes. This paper presents Leti’s contribution to develop generic platforms matching the suitable MEMS technologies within two distinct fields: physical [...]

Novel Nanoeletromechanical Switches for VLSI Power Integrity Improvement

Zhang R., Saab D., Masoo M., Case Western Reserve University, US

Complementary Metal Oxide Semiconductor(CMOS)is facing extreme difficulties to realize energy efficient designs while the scaling of channel length has been being at the same pace in the past several decades.In this paper,we presented a novel [...]

Nanomagnet Logic – From Concept to Prototype

Bernstein G.H., Butler K., Li P., Shah F., Siddiq M., Csaba G., Hu X.S., Niemier M., Porod W., University of Notre Dame, US

As the semiconductor industry foresees an inevitable slowing of Moore's Law, many researchers are trying to develop new technologies that go beyond CMOS, in speed, density, cost, or some other desirable metric. Notre Dame has [...]

Compact MEMS/NEMS Characterization Platform Using a DVD Optical Pick-up Unit with Optical Imaging Function

Chen C-H, Larsen T., Schmid S., Liao H-S, Hwang I-S, Boisen A., Hwu E-T, Academia Sinica, TW

We present a compact, simple and efficient platform for MEMS/NEMS characterization. In this platform, a DVD optical pickup unit (OPU) is combined with a CCD camera. A nano-scale resolution long range X-Y-Z linear stage below [...]

Nano-enabled Green Technologies for Electronics and Energy Applications

Kaul A.B., National Science Foundation, US

Green electronics is largely driven by performance limitations of scaled Si-based CMOS due to the exceptionally high power dissipation arising in such devices at nanoscale dimensions. Novel architectures for computation are currently in consideration, which [...]

Nano-enabled Green Technologies for Electronics and Energy Applications

Kaul A.B., National Science Foundation, US

Green electronics is largely driven by performance limitations of scaled Si-based CMOS due to the exceptionally high power dissipation arising in such devices at nanoscale dimensions. Novel architectures for computation are currently in consideration, which [...]

Temperature-Controlled Molecular Dynamics Study on Velocity-Dependent Threshold Behavior of Nano-Friction

Hayashi K., Mori T., Taniguchi R., Nakamura K., Kanazawa Institute of Technology, JP

Laws of dynamic nano-friction (i.e., continuous wearless friction) were searched for under steady spatial distributions of the local quasi-temperature, by molecular dynamics (MD) simulations. The temperature control of the non-conservative model was carried out by [...]

Novel Nanoelectromechanical Relay Design Procedure for Logic and Memory Applications

Rottenberg X., Rochus V., Jansen R., Ramezani M., Severi S., Witvrouw A., Tilmans H.A.C., IMEC, BE

NanoElectroMechanical Structures/Systems (NEMS) have been the focus of an increasing attention from researchers in recent years for the alternative they offer to conventional CMOS for application in logics, memory and in general digital circuitry. Scaled [...]