MEMS – Page 7 – TechConnect Briefs

Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators

Khazaai J.J., Qu H., Shillor M., Smith L., Oakland University, US

This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]

Multi-purpose tool for checking the microfabrication products

De Pasquale G., Somà A., Politecnico di Torino, IT

This paper introduces a multi-purpose tool addressed to the microfabrication processes monitoring and material property measurement at the wafer level during both process development and manufacturing. The on-line testing tool presented in this paper is [...]

Comparaison between PDMS and PMMA for MEMS applications

Benachaiba C., Bouanini M., University of Bechar, DZ

The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.

Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors

Cullinan M.A., Panas R.M., Culpepper M.L., Massachusetts Institute of Technology, US

Nanonewton level, multi-axis force sensing is required for many biology, materials science and nanomanufacturing applications. Unfortunately, these requirements are difficult to achieve given the size, sensitivity and fabrication limitations associated with existing small-scale sensing techniques. [...]

Programmable MEMS-Based Silicon Timing Solutions Change the Game

Lutz M., SiTime Corp, US

For the past few decades, the electronics industry has relied on quartz based timing solutions, which involve machining of crystals and then marrying them to analog circuits inside an expensive, ceramic package. Furthermore, this package [...]

Integration Approaches of Combining Micro and Nano Technologies

Rouzaud A., Robert Ph., Polizzi J.-Ph., Sillon N., LETI, FR

With an always growing penetration in different mass markets, MEMS are now facing a maturity period, with high constraints for manufacturing simplification and processes standardization in order to lower both costs and time-to-market. In light [...]

Design and Fabrication of a Low Power Electro-thermal V-shape Actuator With Large Displacement

Khazaai J., Oakland University, US

We propose the design and microfabrication of a V-shape MEMS electro-thermal actuator featuring large displacement generation and low power consumption. Electro-thermal MEMS actuators are suitable for a variety of applications where large forces and long [...]

A visual approach on MEMS process modeling using device cross-sections

Schmidt T., Mielke M., Hahn K., Ortloff D., Popp J., Brueck R., University of Siegen, DE

With MEMS entering fast moving consumer markets the need for more efficient design concepts becomes apparent. A technology centered approach where a product is designed around a highly specialized and optimized technology cannot cope with [...]

Finite Element Modeling and Analysis of CMOS-SAW Sensors

Tigli O., Zaghloul M.E., Washington State University Vancouver, US

Finite element (FE) modeling and performance analysis of Surface Acoustic Wave (SAW) devices that are developed in CMOS (Complementary Metal Oxide Semiconductor) technology are presented. CMOS-SAW devices were designed, fabricated and characterized as a biosensor [...]

Passive Temperature-Compensation of MEM Resonators

Rottenberg X., Jansen R., Stoffels S., De Coster J., De Raedt W., De Coster J., De Raedt W., Tilmans H.A.C., IMEC, BE

MEM-resonators are recognized key components for future sensing, wireless and communications applications. Si-based resonators have gained special interest since they offer the perspective to replace bulky quartz resonators on-chip, maintaining high Q-factor and reaching high [...]