MEMS – Page 31 – TechConnect Briefs

Simulation of Electroosmosis Using a Meshless Finite Point Method

Mitchell M.J., Aluru N.R., University of Illinois, US

A Finite Point Method (FPM) based on a weighted least squares interpolation is presented for the simulation of electroosmotic transport in capillaries. This method requires no mesh and involves no Galerkin-type integration, making it more [...]

Lubrication Analysis and Boundary Integral Simulations of a Viscous Micropump

Day R.F., Stone H.A., Harvard University, US

Several recent papers discuss a novel viscous micropump consisting of Poiseuille flow of fluid between two plates and a cylinder placed along the gap perpendicular to the ow direction. If the cylinder is not centered, [...]

Self Aligned Gate JFETs for Smart MEMS

Amon S., Vrtacnik D., Resnik D., Krizaj D., Aljancic U., Levstek A., University of Ljubljana, SI

Self Aligned Gate JFET (SJFET) devices and circuits are reported. The problem of electrical isolation between devices on the same chip is realized through Self Aligned Gate approach, enabling the application of standard bipolar discrete [...]

Modeling of Piezoelectric MEMS Using the Finite Cloud Method

Ohs R.R., Aluru N.R., University of Illinois, US

In this paper we present a meshless based Finite Cloud Method (FCM) for the numerical solution of partial differential equations (PDEs) governing piezoelectricity. Using a point distribution, FCM constructs interpolation functions without assuming any connectivity [...]

Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems

Lu M.S., Fedder G.K., Carnegie Mellon University, US

VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication [...]

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices

Nguyen L., Lee H.J., Maher M.A., von Sosen H., Tanner Research, Inc., US

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices Categories: Co-simulation and Optimization System, Multi-level Modeling Linh Nguyen, Hee Jung Lee, Mary Ann Maher, and Harald von Sosen Tanner Research, Inc. VLSI [...]

Modeling a Piezoelectric Actuator Using a Transformer Equivalent Circuit

Oms-Elisabelar F., Bergaud C., Nicu L., Martinez A., CNRS, FR

In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The [...]

High-Fidelity and Behavioral Simulation of Air Damping in MEMS

Turowski M., Chen Z., Prezekwas A., CFD Research Corporation, US

The paper presents simulations of air damping in MEMS, including squeeze-film and viscous dissipation, using different level models: 3D numerical solution of Navier-Stokes equations (using CFD-ACE from CFDRC), and circuit/behavioral model (in SPICE and Saber/MAST [...]

Coupled Package-Device Modeling for MEMS

Bart S.F., Zhang S., Rabinovich V.L., Cunningham S., Microcosm Technologies, Inc., US

Microelectromechanical Systems (MEMS), by their nature as sensors and actuators, require application specific packaging. The package is the near environment of the MEMS device and hence has a direct effect on its thermal behavior, on [...]

Visual Modeling and Design of Microelectromechanical System (MEMS) Transducers

Dewey A., Icoz E., Duke Univeristy, US

Microelectromechanical Systems (MEMS) integrates miniaturized mechanical structures with electronics to extend the benefits of planar integrated circuit technology to a broader class of systems. To realize the potential and growth of MEMS, new modeling, analysis, [...]