MEMS design – TechConnect Briefs

SUGARX: A Online Tool That Bridges the Gap Between Experiment and Simulation

Marepalli P., Li F., Clark J.V., Purdue University, US

We present a pioneering online tool called SugarX that, for the first time, bridges the gap between experiment and simulation. Our tool is available online at nanoHUB.org with remote experimental control and simulation. A web [...]

Three Degrees of Freedom Thermal Microactuator

Pasupuleti A., Sahin F., Walter W.W., Raisanen A., Hebding J.L., Hirschman K.D., Rochester Institute of Technology, US

This research is focused on the design and fabrication of a three-degrees-of-freedom (DOF) polyimide-based thermal microactuator. The proposed actuator can have displacements simultaneously in the X, Y and Z axes. The operation of the microactuator [...]

Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator

Juillard J., Cristescu M., Guessab S., SUPELEC, Department of Measurement, FR

We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling [...]

Algorithmic and Modeling Aspects in the Electro-thermal Simulation of Thermally Operated Microsystems

Rencz M., Székely V., Poppe A., Courtois B., Micred, HU

A new algorithm has been developed for the layout based electro-thermal simulation of integrated circuits and MEMS, using simultaneous iteration. The general advantage of this method over simulator coupling is that, in contrast with the [...]

A New, Topology Driven Method for Automatic Mask Generation from Three-Dimensional Models

Schiek R., Schmidt R., Sandia National Laboratories, US

We have developed an algorithm which when given a three-dimensional object can infer from the objects topology the two-dimensional masks needed to produce that object with surface micromachining.Our algorithm, called Faethm, calculates the required two-dimensional [...]

Modelling and Optimization of Medical Test Strips Made From Plastics

Peters D., Bolte H., Laur R., University of Bremen, DE

Introduction In cooperation with industrial partners, a behavioural model for the microsystem ‚Medical Test Strips‘ has been created by the authors in order to decrease cost and effort in the design process. As there is [...]

On Design of a Backplate Used in a Hearing Aid

Pedersen N.L., Technical University of Denmark, DK

In this work topology optimization is used to optimize the compliance or the eigenfrequencies of prestressed plates. The prestress is accounted for by including the force equivalent to the prestressing and adding the initial stress [...]

Microelectromechanical Systems (MEMS) Design and Design Automation Research Projects at Duke University

Dewey A., Fair R.B., Duke University, US

This paper presents an overview of microelectromechanical systems (MEMS) research being conducted at Duke University. The Duke University MEMS research program encompasses initiatives in both application design and design automation. These two areas serve synergistic [...]