Three Degrees of Freedom Thermal Microactuator
Hebding J.L., Hirschman K.D., Pasupuleti A., Raisanen A., Sahin F., Walter W.W., Rochester Institute of Technology, US
This research is focused on the design and fabrication of a three-degrees-of-freedom (DOF) polyimide-based thermal microactuator. The proposed actuator can have displacements simultaneously in the X, Y and Z axes. The operation of the microactuator [...]