focused ion beam – TechConnect Briefs

Mechanical fabrication of graphene devices using focused-ion beam: deposition and milling

Chen Z., Kim D., Lei N., Xu J., Xue W., Washington State University, US

The inherent difficulties in handling and producing graphene have been a major barrier in developing such devices. Conventional microfabrication methods are mostly based on chemical etching processes, which often involve tedious masking and aligning steps. [...]

Silicon Nanostructure Fabrication by Direct FIB Writing and TMAH Wet Chemical Etching

Chekurov N., Sievilä P., Tittonen I., Aalto University, FI

The development of nanotechnology based devices requires rapid prototyping methods that can be applied in combination with well-known clean room processing techniques. We show that focused ion beam (FIB) Ga+-ion implantation can be used to [...]

Nanoimprint Mold Manufacturing with Focused Ion Beam

Chang Y.Y., Chen Y-C, Chiou J.M., Chung M., Fu C.S., Huang B.R., Lai S.W., Tzeng Y.H., Weng M.H., Southern Taiwan University of Technology, TW

Nanoimprint lithography (NIL) is an emerging low cost technique for reproducing sub-100 nm pattern in various applications; however, manufacturing the mold for nanoimprint has been a key issue both in expense and resolution. Focused Ion [...]

Effective Use of Focused Ion Beam (FIB) in Investigating Fundamental Mechanical Properties of Metals at the Nano-Scale

Greer J.R., Nix W.D., Palo Alto Research Center, US

In this work, FIB is utilized in manufacturing of nano-pillars to investigate plasticity of metals at nano-scale. Gold nano-pillars were fabricated from bulk gold and epitaxial gold films on MgO substrates and subsequently compressed using [...]

Real-Time Drift Correction of a Focused Ion Beam Milling System

Freeman D., Luther-Davies B., Madden S., Australian National University, AU

We are working towards the fabrication of large periodic optical structures known as photonic crystals. A focused ion beam (FIB) is used to mill holes, which must be smooth and repeatable, with nm positional accuracy. [...]

Carbon nanostructures grown with electron and ion beam methods

Lemoine P., Maguire P.D., McLaughlin J.A.D., Roy S.S., University of Ulster, UK

Simultaneous deposition and patterning of carbon nanostructures can be performed using focused electron beams or ion beams. Although a variety of useful tri-dimensional structures have been prepared (single electron transistor, nanotools, AFM probes, etc.), the [...]

Keywords: focused ion beam

Mechanical fabrication of graphene devices using focused-ion beam: deposition and milling

Silicon Nanostructure Fabrication by Direct FIB Writing and TMAH Wet Chemical Etching

Nanoimprint Mold Manufacturing with Focused Ion Beam

Effective Use of Focused Ion Beam (FIB) in Investigating Fundamental Mechanical Properties of Metals at the Nano-Scale

Real-Time Drift Correction of a Focused Ion Beam Milling System

Carbon nanostructures grown with electron and ion beam methods

Novel Ion Beam Tools for Nanofabrication

Advanced Particle Beam Technologies for Nano-Characterization and Fabrication

MEMS Resonator Tuning using Focused Ion Beam Platinum Deposition

Optical Thin-film Structures for Color Analog, and Digital, Long-term Information Archiving