MEMS Resonator Tuning using Focused Ion Beam Platinum Deposition

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This paper presents a novel post-fabrication tuning method which changes the resonant frequency of micromechanical beam resonators using Focused Ion Beam (FIB) deposition and removal of platinum. Tuning was achieved by depositing platinum on a 13x5m surface area at the tips of cantilever and the middle sections of bridge resonators in thicknesses ranging from 0.3 to 3.1m. Measurements on both types of resonator structures showed a maximum frequency change of -12% for 2.4 and 3.1m thick deposition. A decrease was observed in the quality (Q) factor due to the damping effect of the platinum material and the increased surface roughness of the resonator. After deposition, the change in resonant frequency was re-adjusted by precise milling of the deposited platinum.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: March 7, 2004
Pages: 421 - 424
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9728422-9-2