calibration – TechConnect Briefs

A More Accurate and Precise Method to Calibrate Atomic Force Microscope (AFM) Cantilevers

Clark J.V., Auburn University, US

This paper presents a method for using a calibrated microelectromechanical system (MEMS) device to calibrate an atomic force microscope (AFM) cantilever. Measure- ments of stiffness and deflection can be made with quantifiable uncertainty. The popular [...]

Ultra Uniform Colloidal Particles as Nanoscale Reference Materials

Saunders A.E., Garcia D.A., Oldenburg S.J., nanoComposix, Inc., US

The ability to understand and predict the properties of nanomaterials relies on an accurate measurement of their size, shape, number density, and other physical properties. One challenge associated with many measurement techniques is the lack [...]

Depositing Explosives and Chemical Materials on Relevant Surfaces using Inkjet Technology for Calibration Test Standards

Moon R.P., Fountain III A.W., Guicheteau J.A., Christesen S.D., Green N., Hung K., Tripathi A., US Army, US

Materials deposited on manmade or natural surfaces are frequently utilized as calibration standards for chemical or explosive detecting systems. The U.S. Army Edgewood Chemical Biological Center (ECBC) has redesigned a standard inkjet printer to be [...]

Gravimetric calibration for optical measurements of droplets-in-flight

Verkouteren J.R., Verkouteren R.M., Zeissler C.J., Verkouteren J.R., Verkouteren R.M., National Institute of Standards and Technology, US

We report gravimetric measurements of droplets, traceable to the SI, that enable the correction and calibration of optical measurements routinely used to monitor and control the dispensing of droplets from inkjet printers. This innovation results [...]

The field self-calibration method of MEMS gyroscopes and accelerometers for Micro inertial measurement system

Li J.L., Chen A.S., Du M., Beijing University of Aeronautics and Astronautics, CN

The Micro Inertial Measurement System (MIMS) is important equipment for micro aircraft and robot. The biases calibration of MEMS gyroscopes and accelerometers are an effective way to reduce measurement error. In according to error mathematical [...]

Calibration and Validation Procedure for Reliable and Predictive High-level Transducer Models Suited for System-level Design

Khalilyulin R., Schrag G., Wachutka G., Münich University of Technology, DE

We present an elaborated parameter extraction and model validation procedure for high-level transducer models that are aimed for system-level design as well as for hardware-software co-simulation (Matlab/Simulink transducer model embedded in control circuitry) in order [...]

Methodology for Prediction of Ultra Shallow Junction Resistivities Considering Uncertainties with a Genetic Algorithm Optimization

Renard C., Scheiblin P., de Crécy F., Ferron A., Guichard E., Holliger P., Laviron C., CEA-LETI, FR

The accurate prediction of arsenic activation after spike annealing is mandatory for Ultra Shallow Junction (USJ) sheet resistance optimization for advanced NMOS transistors engineering. For the first time, we propose a fast and efficient methodology [...]

Predictive and Calibrated Simulation of Doping Profiles: Low Energy As, B and BF2 Ion Implantation

Scheiblin P., Roger F., Poncet D., Laviron C., Holliger P., Laugier F., Guichard E., Caire J.P., LETI, FR

In this work, we propose calibrated models for predictive simulation of low energy Arsenic, Boron and BF2 ion implantation in the suitable range for sub-100nm CMOS technology. The International Technology Roadmap for Semiconductors (ed. 1999) [...]

Systematic Global Calibration of a Process Simulator

Lee J-H., Lee S-W., Kim K-D., Kim Y-W., Kong J-T., Lee J-H., Lee S-W., Kim K-D., Kim Y-W., Baek D-H., Samsung Electronics Co.Ltd., KR

This paper proposes a novel methodology of systematic global calibration of a process simulator and validates its accuracy and efficiency with application to memory and logic devices. With 175 SIMS profiles which cover the whole [...]

Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling

Chan E.K., Garikipati K., Dutton R.W., Stanford University, US

The entire process of calibrating an electromechanical simulator ñ identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device ñ is presented. The [...]