This paper presents a method for using a calibrated microelectromechanical system (MEMS) device to calibrate an atomic force microscope (AFM) cantilever. Measure- ments of stiffness and deflection can be made with quantifiable uncertainty. The popular AFM is responsible for initiating the field of nanotechnology; however, the AFM has been quite inaccurate, with measurements yielding only about one significant digit. Traditional AFM calibration methods are about 10% uncertain with unknown accuracy. The present calibration method appears to have superior accuracy, precision, repeatability, and reliability. Accuracy is from using electro-micro metrology (EMM), precision is based on eliminating unknown or coarsely-known dependencies, repeatability is through well-defined gap- stops, and reliability is achieved through the method’s independence of parasitics. In this paper we present a packageable, practical, stiffness and deflection calibration method for microscale cantilevers.
Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 326 - 329
Industry sector: Sensors, MEMS, Electronics
Topicss: Nanoelectronics, Sensors - Chemical, Physical & Bio