The entire process of calibrating an electromechanical simulator ñ identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device ñ is presented. The simulation model for electrostatically-actuated beams is calibrated to a wide range of electrical and optical test structure measurements and is then used to predict the behavior of more complex dual-bias-electrode structures. Various mechanical discontinuities, and post-buckled pull-in behavior are addressed explicitly. Arbitrary fitting coefficients that limit generality are avoided. The well-characterized behavior of the dual-electrode structures can serve as verification test cases for evaluating coupled electromechanical simulators.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 194 - 197
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems