US – Page 457 – TechConnect Briefs

Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods

Reh S., Lethbridge P., Ostergaard D.F., ANSYS, Inc., US

The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved [...]

High-Fidelity and Reduced Models of Synthetic Microjets

Przekwas A.J., Turowski M., Chen Z., CFD Research Corporation, US

Microfabricated arrays of synthetic jets are being explored for applications in aerodynamic flow control, in cooling of electronic packages, and in mixing in microchemical reactors. Computational simulation of coupled unsteady fluid mechanics and electromechanical actuation [...]

3D MEMS Design via Matlab Interactive Plots

Lo N.R., Pister K.S.J., University of California, US

Matlab is utilized for 3D MEMS design. A preprocessor, written in C, processes the standard, 2D CIF design by applying the topology and spatial information to the design. The Mat3d toolkit then takes the output [...]

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)

Ostergaard D.F., Gyimesi M., ANSYS, Inc., US

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program.

Simulation of Aluminum Micro-mirrors for Space Applications at Cryogenic Temperatures

Kuhn J.L., Dutta S.B., Greenhouse M.A., Mott D.B., NASA/Goddard Space Flight Center, US

Closed form and finite element models are developed to predict the device response of aluminum electrostatic torsion micro-mirrors fabricated on silicon substrate for space applications at operating temperatures of 30K. Initially, closed form expressions for [...]

Modeling and Simulation of a Permanent Magnet Array in Elliptical Configurations

Lee S.J., Jiles D.C., Iowa State University, US

Permanent magnet arrays have advantages for magnetic field generation over the traditional current based magnetic flux sources, such as electromagnets, in that they do not require a power supply and cooling system. Magnetic flux density [...]

Modeling and Design of a Micromechanical Phase-Shifting Gate Optical Modulator

Que L., Witjaksono G., Gianchandani Y.B., University of Wisconsin, US

This paper reports the modeling and design of a micromechanical optical modulator with a phase-shifting gate that utilizes optical interference effects to modulate light. The gate is opened or closed by microactuators integrated on the [...]

Optical Propagation Methodologies for Optical MEM Systems

Kurzweg T.P., Levitan S.P., Martinez J.A., Marchand P.J., Shomsky M.T., Chiarulli D.M., University of Pittsburgh, US

In this paper, we examine optical propagation techniques for modeling and simulating optical MEM systems. We determine an appropriate technique through studying two criteria: the requirements established by the physical properties of these systems and [...]

Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications

Gupta A., Bashir R., Neudeck G.W., McElfresh M., Purdue University, US

This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with [...]

The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices

Mankame N., Ananthasuresh G.K., University of Pennsylvania, US

Electro-thermal micro actuators that operate by virtue of constrained thermal expansion induced by Joule heating, have recently received considerable attention. We use electro-thermal actuation to create monolithic compliant devices with embedded actuation in which the [...]