US – Page 458 – TechConnect Briefs

Modeling and Control of Nanomirrors for EUV Maskless Lithography

Chen Y., Shroff Y., Oldham W.G., University of California, US

The design of mirrors for use in EUV maskless lithography is presented in this paper. We propose a novel nanomirror system with a linear comb actuator, which has favorable stability and performance. A bias voltage [...]

Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact

Chan E.K., Dutton R.W., Stanford University, US

The effective electrical gap between two conducting surfaces sandwiching a thin dielectric layer varies with applied voltage and pressure. Improved methods for measuring and modeling this variation are presented. Optical surface profile measurements of fixed-fixed [...]

Computational Studies of Membrane-Based Test Formats

Krishnamoorthy S., Makhijani V.B., Lei M., Giridharan M.G., Tisone T., CFD Research Corporation, US

Membrane-based test formats provide simple, accurate and cost effective diagnoses of acute and chronic conditions in general population health. The sensitivity of the immunoassay is determined by the complex biochemical binding kinetics associated with the [...]

Air-damping Effect on a Micro- and Nano-machined Beam Resonator

Xu G., Zhang C., Jiang Q., University of California, US

The air-damping effect on the resonant frequency and the quality factor of a micro- and nano-machined beam resonator is studied. The beam, placed in a uniform magnetic field, is driven to vibrate transversely by the [...]

Design, Fabrication and Experimental-Numerical Study of PZT Sensors

Arik M., Zurnx S.M., Yigit K.S., Bar-Cohen A., University of Minnesota, US

MEMS micropumps, based on PZT membranes have been designed and fabricated at the Microtechnology Laboratory of the University of Minnesota for use in fluid flow control, and as chemical and pressure sensors. Design, fabrication and [...]

Theoretical Approximations for the Average Linear Flow of Carrier Gas Through a Rectangular GC Column

Spangler G.E., Technispan LLC, US

The ability of a gas chromatographic (GC) column to separate two compounds is determined by its analytical resolution. The height equivalent to a theoretical plate (HETP) is given by Eq. 1. For a rectangular column, [...]

Hierarchical Simulation for Microelectrofluidic System Performance Analysis

Zhang T., Dewey A., Duke University, US

With the sophisticated development of microelectro fluiidic devices and systems, system performance analysis is a key for system optimization and system re-design. Due to the increasing complexity and natural characteristics of microsystems, system performance is [...]

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