US – Page 394 – TechConnect Briefs

Function-Oriented Geometric Design Approach To Surface Micromachined MEMS

Gao F., Hong Y.S., University of Toledo, US

Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design [...]

Dynamic Modeling and Input Shaping for MEMS

Popa D.O., Wen J.T., Stephanou H.E., Skidmore G., Ellis M., Rensselaer Polytechnic Institute, US

In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of [...]

Computationally Efficient Dynamic Modeling of MEMS

Popa D.O., Critchley J., Sadowski M., Anderson K.S., Skidmore G., Rensselaer Polytechnic Institute, US

Traditional modeling work in MEMS includes simplified PDE/ODE formulation, based on physical principles, and Finite Element Analysis. More recently, reduced order modeling techniques using Krylov subspace decomposition have been proposed in the context of nodal [...]

Using Topology Derived Masks to Facilitate 3D Design

Schiek R., Schmidt R., Sandia National Laboratories, US

To accelerate MEMS design for surface micromachining applications, an algorithm and associated design tool have been created which translates designers’ 3D models into 2D lithographic production masks. Typically, designing a surface micromachined, MEMS device requires [...]

Dynamic Simulations of a Novel RF MEMS Switch

Younis M.I., Abdel-Rahman E.M., Nayfeh A.H., Virginia Tech, US

We present a dynamic analysis of a novel RF MEMS switch utilizing the dynamic pull-in phenomenon. We study this phenomenon and present guidelines about its mechanism. We propose to utilize this phenomenon to design a [...]

Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators

Atre A., Boedo S., Rochester Institute of Technology, US

Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures [...]

A Model for Thermoelastic Damping in Microplates

Nayfeh A.H., Younis M.I., Virginia Tech, US

We present a model and analytical expressions for the quality factors of microplates due to thermoelastic damping. We solve the heat equation for the thermal current across the thickness of a microplate, and hence decouple [...]

Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces

Younis M.I., Nayfeh A.H., Virginia Tech, US

We present a model for the dynamic behavior of microplates under the coupled effects of squeeze-film damping, electrostatic actuation, and mechanical forces. The model simulates the dynamics of microplates and predicts their quality factors under [...]

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

Zhao X., Dankowicz H., Reddy C.K., Nayfeh A.H., Virginia Tech, US

We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law [...]

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Musson L.C., Ho P., Plimpton S.J., Schmidt R.C., Sandia National Laboratories, US

The surface micromachining processes used to manufacture MEMS devices and integrated circuits transpire at such small length scales and are sufficiently complex that theoretical analysis of them is particularly inviting. Under development at Sandia National [...]