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South Korea

Kinetic Monte Carlo Study on Silicon Pre-Implant Technique

Kim J-S, Kim Y.K., Kim J-S, Kim Y.K., Yoon K-S, Won T., Inha univ., KR
In this work, we investigated the effect of Si pre-implantation on the low energy B implant and boron activation enhancement during the post-implant annealing process using KMC. For investigating Si pre implantation effect, Si implantation [...]

Flame synthesis of carbon nanotubes using a double-faced wall stagnation flow burner

Woo S.K., Hong Y-T, Kwon O.C., Sungkyunkwan University, KR
The potential of using a double-faced wall stagnation flow burner in mass production of carbon nanotubes was evaluated experimentally and computationally. With nitrogen-diluted premixed ethylene-air flames established on the Ni-coated stainless steel or Ni-sintered, double-faced [...]

Fabrication of Cu-encapsulated Carbon Nanotube Inductors

Lee B.C., Lee J-O, Lee B.C., Lee J-O, Choi Y.K., Yoon J.-B., Korea Institute of Science and Technology(KIST), KR
In this works, we developed a top-down fabrication method to pattern and form carbon nanotube(CNT) interconnects with Cu encapsulation. Using this method, we fabricated spiral Cu-encapsulated CNT inductors for RF ICs and investigated the inductance [...]

Electrospun TiO2 nanofibers for gas sensing applications

Kim D.Y., Kim I-D, Rothschild A., Tuller H.L., Kim D.Y., Kim I-D, Jo S.M., Korea Institute of Science and Technology, KR
TiO2 fiber mats were deposited onto Al2O3 substrates with interdigitated Pt electrodes by means of electrospinning from a solution of DMF and PVAc synthesized using bulk radical polymerization of titanium propoxide and acetic acid as [...]

Active Sealing for Soft Poymer Microchips

Bang H., Lee J., Lee W.G., Park J., Yun H., Lee J., Lee W.G., Chung C., Chung S., Cho K., Chung C., Chung S., Han D-C, Chang J.K., Seoul National University, KR
This paper presents a universal sealing method for soft polymer (elastomer) microchips. A robust and reversible sealing method which allows various materials to be bonded and sealed tightly with each other even in aqueous solutions, [...]

Ultra High performance In-line Contact MEMS RF Switch

Hong Y-T, Kim C-H, Lee S-H., Kwon S-W, Song I-S, Samsung Advanced Institute of Technology, KR
An in-line direct RF MEMS Switch was presented in this paper. This switch having single contact point was fabricated, and characterized. The switch is a series type and is actuated by a supportive membrane. A [...]

Three-dimensional Simulation method of Anisotropic Wet Chemical Etching Process

Lee J-G, Won T., Inha University, KR
Anisotropic wet chemical etching is still one of the fundamental techniques employed in silicon bulk micromaching. However, there are still unsolved problems with the simulation of the process. And most of the available simulation software [...]

Design and Fabrication of Flexible OTFT Array by using Nanocontact Printing

Jo J., Kim K-Y, Lee E-S, Esashi M., Korea Institute of Machinery and Materials(KIMM), KR
The high-resolution and large-area flexible OTFT array to use as a driving device for an OLED was designed and fabricated in the nanocontact printing process and organic thin films could be deposited even in a [...]

Novel PDMS stamp for imprint lithography

Maeng I.S., Samsung Electro-mechanics Co. Ltd., KR
New PDMS/epoxy composite material which has sufficent mechanical strength is used as a stamp for the imprinting lithography. Its fabrication procedure, and the imprinting results using this stamp will be discussed.

Replication of Highly-Hydrophobic Surface with Micro/Nano Combined Structures from Nature

Lee S.M., Kwon T.H., Pohang University of Science and Technology, KR
A highly-hydrophobic film has successfully been fabricated by simply replicating plant leaf surface with micro/nano combined structures. A plant leaf was used as a master to make a mold by nickel electroforming. The positive polymer [...]

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