Novel PDMS stamp for imprint lithography


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New PDMS/epoxy composite material which has sufficent mechanical strength is used as a stamp for the imprinting lithography. Its fabrication procedure, and the imprinting results using this stamp will be discussed.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 7, 2006
Pages: 270 - 272
Industry sector: Advanced Materials & Manufacturing
Topic: Advanced Manufacturing
ISBN: 0-9767985-8-1