A novel accelerometer proposed in this paper utilizes desired advantages which waveguide structure has as its sensor, such as high sensitivity due to photoelastic effect and wide spectral response range. It extends previous research by [...]
We develop a super compact optical fluorescence spectrometer. Our unique innovative design combines advantages of guided wave planar optics and free-space microoptics. This innovation allows for miniaturization that is not achievable with pure planar or [...]
We present and characterize a novel micro-rotor actuation concept, where acoustic oscillations of a micro-bubble produce a steady fluid flow driving a microfabricated rotor at a rotating speed as high as 600 rpm. Developing micro-machines [...]
The dynamic performance of micro-machined Coriolis flow meters Summary The performance of a prototype MEMS mass-flow meter developed by ISSYS was investigated using the Brunel University Virtual Coriolis Meter facility. The flow meter comprises a vacuum sealed [...]
In this work, a new planar structure of solid propellant micro-rocket, for microspacecraft and Micro-Air-Vehicle applications is reported. These applications require extremely low levels of thrust and impulse in a very sort time. We have [...]
Effective patent portfolios provide a competitive advantage to high-tech companies by (i) protecting the company’s core technologies or “crown jewels,” (ii) defining areas of exclusivity and barriers to entry to the marketplace by competitors, (iii) [...]
We present an analytical model and use it to find closed-form expressions describing the response of a tunable MEMS RF filter. The filter is made of two identical clamped-clamped micro-beams suspended over input and output [...]
This paper presents the design of an acceleration sensing transmitter using Micro Electro Mechanical System (MEMS) capacitive accelerometer. It describes the accelerometer sensor interfacing circuit, rms-to-dc converter and voltage to current loop converter circuit design, [...]
Objectives: Bonding surface preparation, process conditions, and integrated on-chip metal sheet resistance variation during bonding process were investigated in this work. Methods: We flatten the surface of the etched micro-channels with a fresh solution of [...]
, Harrison R.
, Hsu J.
, Klein M.
, Normann R.A.
, Oppermann H.
, Rieth L.
, Solzbacher F.
, Tathireddy P.
, University of Utah and Fraunhofer Institute, Germany, US
Chronically implantable wireless neural interfaces require biocompatible and stable high density integration of sensing, data processing, communication and power supply. The objective of this research was to develop a biocompatible wafer level integration technology for [...]
As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the [...]
Anisotropic wet chemical etching is still one of the fundamental techniques employed in silicon bulk micromaching. However, there are still unsolved problems with the simulation of the process. And most of the available simulation software [...]
The work reported shows how the frequency of vibration of simple beam structures can be changed significantly through the action of electrostatic pull-in. The application of a voltage between the beam and a supporting, but [...]
This paper develops a fuzzy-logic based procedure for quantitative cost and benefit calculation of MEMS application for structural health monitoring of transportation infrastructure. This will be a major step forward for widespread MEMS application in [...]
Dielectrophoresis (DEP) is a phemomenon of induced particle motion in non-uniform electric fields. In this paper, we will describe how the phenomenon can be used to design electrokinetic ratchet devices to provide both linear and [...]
A microfluidic channel and a contactless capacitance detector wereintegrated on a glass chip by a semiconductor manufacturing process forseparating and analyzing Rhodamine B and inorganic ion. The electrodes of thecapacitance detector were formed successively by [...]
capacitive pressure sensor, membrane thickness, membrane shape, sensitivity
An in-line direct RF MEMS Switch was presented in this paper. This switch having single contact point was fabricated, and characterized. The switch is a series type and is actuated by a supportive membrane. A [...]
The cavity is the main element of each linear accelerator used for high-energy physics purpose. The resonant frequency of cavities depends on its shape. Due to the pulse operation they are deformed by dynamic Lorentz [...]
We present an example of making a negative-coefficient material - Negative Poisson’s Ratio (NPR) material, which expands in the cross section when stretching. The NPR materials can provide unique characteristics in energy absorption. The NPR [...]
Micro-Opto-Electro-Mechanical Systems (MOEMS) have found many applications in the fields of communication, spectroscopy, and displays. MOEMS devices based on dynamic diffractive elements are currently investigated at CNSE. The possible applications include: optical switching, signal monitoring, [...]
, Chang J.K.
, Cho K.
, Chung C.
, Chung S.
, Han D-C
, Lee J.
, Lee W.G.
, Park J.
, Yun H.
, Seoul National University, KR
This paper presents a universal sealing method for soft polymer (elastomer) microchips. A robust and reversible sealing method which allows various materials to be bonded and sealed tightly with each other even in aqueous solutions, [...]
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 7, 2006
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications