MEMS, NEMS & Sensing – TechConnect Briefs

A Novel Optical Waveguide Based Accelerometer

Chen F., Salcic Z., Wang J., The University of Auckland, NZ

A novel accelerometer proposed in this paper utilizes desired advantages which waveguide structure has as its sensor, such as high sensitivity due to photoelastic effect and wide spectral response range. It extends previous research by [...]

Optical Micro-Spectrometer with Sub-Nanometer Resolution

Avrutsky I., Chaganti K., Salakhutdinov I., Auner G., Wayne State University, US

We develop a super compact optical fluorescence spectrometer. Our unique innovative design combines advantages of guided wave planar optics and free-space microoptics. This innovation allows for miniaturization that is not achievable with pure planar or [...]

A Bio-Inspired Rotor Powered by a Micro-Bubble

Kao J., Warren J., Xu J., Attinger D., Columbia University, US

We present and characterize a novel micro-rotor actuation concept, where acoustic oscillations of a micro-bubble produce a steady fluid flow driving a microfabricated rotor at a rotating speed as high as 600 rpm. Developing micro-machines [...]

The Dynamic Performance of a Micro-machined Coriolis Flow Meter

Clark C., Wang S., Cheesewright R., Brunel University, UK

The dynamic performance of micro-machined Coriolis flow meters Summary The performance of a prototype MEMS mass-flow meter developed by ISSYS was investigated using the Brunel University Virtual Coriolis Meter facility. The flow meter comprises a vacuum sealed [...]

MEMS-based solid propellant micro-rocket with micro-igniter on thin membrane for next generation of low-cost small space and aeronautic engines

Chaalane A., Rossi C., Estève D., LAAS/CNRS, FR

In this work, a new planar structure of solid propellant micro-rocket, for microspacecraft and Micro-Air-Vehicle applications is reported. These applications require extremely low levels of thrust and impulse in a very sort time. We have [...]

Building an Effective Patent Portfolio

Itchkawitz B.S., KNOBBE, MARTENS, OLSON & BEAR LLP, US

Effective patent portfolios provide a competitive advantage to high-tech companies by (i) protecting the company’s core technologies or “crown jewels,” (ii) defining areas of exclusivity and barriers to entry to the marketplace by competitors, (iii) [...]

Tuning of a MEMS RF Filter

Hammad B.K., Abdel-Rahman E.M., Nayfeh A.H., Virginia Polytechnic Institute and State University, US

We present an analytical model and use it to find closed-form expressions describing the response of a tunable MEMS RF filter. The filter is made of two identical clamped-clamped micro-beams suspended over input and output [...]

Low Cost Vibration Measuring Device Using MEMS Accelerometer

Pandiyan J., Umapathy M., Balachandar S., Arumugam M., Ramaswamy S., Larsen & Toubro Limited, IN

This paper presents the design of an acceleration sensing transmitter using Micro Electro Mechanical System (MEMS) capacitive accelerometer. It describes the accelerometer sensor interfacing circuit, rms-to-dc converter and voltage to current loop converter circuit design, [...]

The Bonding Technology for Microchannels with Electrode Patterns on the Glass Substrates

Parng S.H., Yang H.J., Shia T.K., Microsystem Technology Common Laboratory, TW

Objectives: Bonding surface preparation, process conditions, and integrated on-chip metal sheet resistance variation during bonding process were investigated in this work. Methods: We flatten the surface of the etched micro-channels with a fresh solution of [...]

Biocompatible Hybrid System Integration of Silicon Based Neural Interface Device

Tathireddy P., Chakravarthy S., Hsu J., Klein M., Oppermann H., Rieth L., Harrison R., Normann R.A., Solzbacher F., University of Utah and Fraunhofer Institute, Germany, US

Chronically implantable wireless neural interfaces require biocompatible and stable high density integration of sensing, data processing, communication and power supply. The objective of this research was to develop a biocompatible wafer level integration technology for [...]

MEMS Reliability Assessment Program – Progress to Date

Zunino III J.L., Skelton D.R., U.S. Army ARDEC, US

As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the [...]

Three-dimensional Simulation method of Anisotropic Wet Chemical Etching Process

Lee J-G, Won T., Inha University, KR

Anisotropic wet chemical etching is still one of the fundamental techniques employed in silicon bulk micromaching. However, there are still unsolved problems with the simulation of the process. And most of the available simulation software [...]

Frequency Tuning of Micro-beams using Electrostatic Pull-in

Burdess J.S., Harris A.J., Kafumbe S., University of Newcastle, UK

The work reported shows how the frequency of vibration of simple beam structures can be changed significantly through the action of electrostatic pull-in. The application of a voltage between the beam and a supporting, but [...]

Investigating the Benefit-Cost of MEMS Application for Structural Health Monitoring of Transportation Infrastructure

Jha M.K., Davy A.B., Morgan State University, US

This paper develops a fuzzy-logic based procedure for quantitative cost and benefit calculation of MEMS application for structural health monitoring of transportation infrastructure. This will be a major step forward for widespread MEMS application in [...]

Dielectrophoretic ratchets for linear and rotary nanomotors

Hughes M.P., Astumian R.D., University of Surrey, UK

Dielectrophoresis (DEP) is a phemomenon of induced particle motion in non-uniform electric fields. In this paper, we will describe how the phenomenon can be used to design electrokinetic ratchet devices to provide both linear and [...]

A Capillary Electrophoresis Chip for Rhodamine B and Inorganic Ion detection Utilizing Contactless Capacitance Detection

Liu W.L., Chen W.J., Hsieh S.H., Tsai T.K., National Pingtung University of Science and Technology, TW

A microfluidic channel and a contactless capacitance detector wereintegrated on a glass chip by a semiconductor manufacturing process forseparating and analyzing Rhodamine B and inorganic ion. The electrodes of thecapacitance detector were formed successively by [...]

Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

Sabet A., Avula X.J., Washington University in St. Louis, US

capacitive pressure sensor, membrane thickness, membrane shape, sensitivity

Ultra High performance In-line Contact MEMS RF Switch

Hong Y-T, Kim C-H, Lee S-H., Kwon S-W, Song I-S, Samsung Advanced Institute of Technology, KR

An in-line direct RF MEMS Switch was presented in this paper. This switch having single contact point was fabricated, and characterized. The switch is a series type and is actuated by a supportive membrane. A [...]

Electromechanical System for Lorentz Force Compensation

Sekalski P., Napieralski A., Simrock S., Technical University of Lodz, PL

The cavity is the main element of each linear accelerator used for high-energy physics purpose. The resonant frequency of cavities depends on its shape. Due to the pulse operation they are deformed by dynamic Lorentz [...]

Negative-Poisson’s-Ratio (NPR) Microstructural Material by Soft-Joint Mechanism

Lu Y-W, Chang C-J, Lin P-T, Gea H-C, Rutgers University, US

We present an example of making a negative-coefficient material - Negative Poisson’s Ratio (NPR) material, which expands in the cross section when stretching. The NPR materials can provide unique characteristics in energy absorption. The NPR [...]

Optimization of Diffractive MEMS for Optical Switching

Verheggen J., Panaman G., Khan Raja W., Castracane J., University at Albany-SUNY, US

Micro-Opto-Electro-Mechanical Systems (MOEMS) have found many applications in the fields of communication, spectroscopy, and displays. MOEMS devices based on dynamic diffractive elements are currently investigated at CNSE. The possible applications include: optical switching, signal monitoring, [...]

Active Sealing for Soft Poymer Microchips

Bang H., Lee J., Lee W.G., Park J., Yun H., Lee J., Lee W.G., Chung C., Chung S., Cho K., Chung C., Chung S., Han D-C, Chang J.K., Seoul National University, KR

This paper presents a universal sealing method for soft polymer (elastomer) microchips. A robust and reversible sealing method which allows various materials to be bonded and sealed tightly with each other even in aqueous solutions, [...]

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