Tuning of a MEMS RF Filter

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We present an analytical model and use it to find closed-form expressions describing the response of a tunable MEMS RF filter. The filter is made of two identical clamped-clamped micro-beams suspended over input and output electrodes, running parallel to each other, and connected by a weak micro-beam. The model accounts for general nonlinear dynamic loads and coupling of mechanical and electrical forces. It extends our earlier model to general operating conditions by allowing for a combined DC and AC input signal (V_DC-in , V_AC) and a DC voltage V_DC-out applied on the output beam. The DC components are used to magnify the RF signal, tune the filter, and reduce the insertion loss.
The model allows designers to predict the achievable center frequency, tuning range, bandwidth, and insertion loss of tunable RF filters.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 7, 2006
Pages: 345 - 348
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9767985-8-1