Surface acoustic wave (SAW) technology can be used to create a variety of different sensors, including strain, chemical, pressure, and temperature. These sensors can be configured to be passive and wireless, which could be useful [...]
, Janes, J.
, Quenzer, H.-J.
, Schwarzelbach, S.
, Stenchly, V.
, Wagner, B.
, Fraunhofer Inst. Silicon Technology, DE
A new process technology has been developed by Fraunhofer Institute Silicon Technology for manufacturing precise optical components from borosilicate glass by eight inch wafer batch processing. Glass forms are produced by a contact-less glass flow [...]
, Falgayrettes, P.
, Gall-Borrut, P.
, Kribich, R.
, Maillard, F.
, Nativel, E.
, Tsigara, A.
, Universite Paris Sud, FR
In this paper we present the microfabrication steps of sol gel and polymer (SU8) based cantilever probe systems using an alternative batch front face fabrication process. The probes are consisting of cantilevers with pyramidal nanoengineered [...]
The aim of this study was to find an alternative method for conventional glass-glass bonding. The goal was to minimize heat affect, shorten process time, and avoid use of additive materials but still obtain excellent [...]
The design, fabrication, and characterization of a virtual pivot MEMS actuator with externally mounted mirror is presented. The provision for an externally mounted mirror can be useful for many optical applications which require large and [...]
, Harnett, C.K.
, James, K.T.
, Keynton, R.S.
, Lucas, T.M.
, Moiseeva, E.V.
, O’Toole, M.G.
, University of Louisville, US
Development of microscale actuating technologies has been critical for interacting with natural components at the cellular level. Small-scale actuators and switches have potential in areas such as microscale pumping and particle manipulation. Thermal actuation has [...]
This paper describes the design and characterization of a novel thermal actuator used in a locking switch. Because of the locking mechanism, no energy is needed to stay in the open or closed state. The [...]
, Hobosyan, M.
, Liu, F.
, Lyshevski, S.E.
, Martirosyan, K.S.
, Puchades, I.
, Thakur, S.
, Rochester Institute of Technology, US
Microthrusters are used in flight and underwater platforms. The MEMS-technology microthrusters with nanostructured energetic composites increase thrust-to-weight ratio and ensure the overall requirements. The integrated MEMS micromachining ensures fabrication simplicity, affordability, robustness, integrability, compatibility and [...]
Instead of making machines smaller that work well in the macro world, we envision a new class of machines that are specifically designed to take advantage of what works well in the micro-scale world. These [...]
This paper presents viscosity measurements performed on standard commercially-calibrated oils as well as to motor oils measured on a commercial cone-and-plate viscometer. Figure 2 shows the response of the sensor, in the frequency domain, when [...]
This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port [...]
One of the fundamental structural requirements for successful performance of N/MEM devices such as nanoswitches, nanoresonators and biosensors is low strain gradient. Excessive strain gradient leads to unwanted deflection, which consequently alters the dynamic and [...]
Modern techniques used in microelectromechanical systems (MEMS) sensor fabrication are adequate for use in most of today’s planar devices, which do not require flexibility to function. However, it’s difficult for a rigid structure to conform [...]
, Maier, T.
, Mutinati, G.C.
, Rohracher, K.
, Schrank, F.
, Siegert, J.
, Steinhauer, S.
, Materials Center Leoben Forschung GmbH, AT
CuO nanowires are locally synthesized on CMOS microhotplates leading to the realization of functional gas sensing devices. Only approximately 20mW are needed in order to heat the CMOS microhotplates to a temperature around 350°C, which [...]
Particulate matter is ubiquitous in the environment however industrial processes increase the amount released in the air. Here we show the initial development of a novel sensor capable of detecting airborne particulate matter in real [...]
, Butler, K.
, Csaba, G.
, Hu, X.S.
, Li, P.
, Niemier, M.
, Porod, W.
, Shah, F.
, Siddiq, M.
, University of Notre Dame, US
As the semiconductor industry foresees an inevitable slowing of Moore's Law, many researchers are trying to develop new technologies that go beyond CMOS, in speed, density, cost, or some other desirable metric. Notre Dame has [...]
In this paper, we propose a method that uses magnetic nanoparticles (MNPs) to detect, and also estimate sizes of rare cells using Hall-effect. Rare cells labeled with MNPs are detected in-flow using a pair of [...]
We present the FEM modeling and simulation of a cantilever type piezoelectric energy harvester constructed using PVDF-TrFE. PVDF-TrFE is a CMOS compatible, soft piezoelectric polymer with a moderate electromechanical coupling coefficient. It is also flexible [...]
In this study, we use finite element method (FEM) analysis to show the possibility of a microsystem capable of detecting and analyzing liquid and solid media in minute amounts using surface acoustic wave (SAW) devices [...]
We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed [...]
, Mao, S.P.
, Nauwelaers, B.
, Rochus, V.
, Rottenberg, X.
, Severi, S.
, Tilmans, H.A.C.
, Verbist, A.
, IMEC, BE
This paper presents the modeling, simulation and experimental verification of the transmit and receive properties of a single cell capacitive micromachined ultrasonic transducer (cMUT). It is a confirmation that the equivalent circuit model provides a [...]
This paper discusses the thermal analysis of Gate Electrode Workfunction Engineered Recessed Channel (GEWE-RC) MOSFET involving an RC and GEWE design integrated onto a conventional MOSFET. Furthermore, it focuses on the comparative study of conventional [...]
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics
Published: June 15, 2014
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications