Fuller L.F. – TechConnect Briefs

CMOS-Compatible Thermally Actuated MEMS Viscosity Sensor with Aluminum on Silicon Membrane

Puchades I., Fuller L.F., Lyshevski S.E., Rochester Institute of Technology, US

This paper presents viscosity measurements performed on standard commercially-calibrated oils as well as to motor oils measured on a commercial cone-and-plate viscometer. Figure 2 shows the response of the sensor, in the frequency domain, when [...]

Nanotechnology-Enabled Microthrusters:Nanoenergetic Materials and MEMS Paradigm

Puchades I., Hobosyan M., Fuller L.F., Liu F., Thakur S., Martirosyan K.S., Lyshevski S.E., Rochester Institute of Technology, US

Microthrusters are used in flight and underwater platforms. The MEMS-technology microthrusters with nanostructured energetic composites increase thrust-to-weight ratio and ensure the overall requirements. The integrated MEMS micromachining ensures fabrication simplicity, affordability, robustness, integrability, compatibility and [...]