Papers – Page 6 – TechConnect Briefs

Combined Device- and System-level Simulation of RF MEMS Switches

Schrag G., Künzig T., Niessner M., Wachutka G., Technical University of Münich, DE

We present two problem-adapted, tailored modeling approaches for RF-MEMS switches which, in principle, are applicable to any capacitive MEMS device. They are based on finite element analysis (FEA) combined with analytical, lumped-element, and reduced-order modeling [...]

Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process and Anodic Bonding

Toan N.V., Hahng S., Song Y., Ono T., Tohoku University, JP

This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. The silicon through-wafer interconnects have been investigated by glass reflow process. Then, [...]

New Designs for MEMS-Micromirrors and Micromirror Packaging with Electrostatic and Piezoelectric Drive

Gu-Stoppel S., Stenchly V., Kaden D., Quenzer H.-J., Wagner B., Hofmann U., Dudde R., Fraunhofer Institute Silicon Technology, DE

New devices of 1 and 2dimensional micro-mirrors based on new designs and new process capabilities using piezoelectric actuators are presented. For micro-mirrors an 8’’ wafer-level packaging process was developed using pre-processed borosilicate glass wafers. An [...]

Freestanding Membranes of Cross-Linked Gold-Nanoparticles: Novel Functional Material for MEMS/NEMS Applications

Schlicke H., Schröter C.J., Rebber M., Battista D., Kunze S., Vossmeyer T., University of Hamburg, DE

We present the focus of our current research, which is the investigation of the electronic and mechanical properties of freestanding gold nanoparticle (GNP) membranes, e.g. by micro bulge tests with atomic force microscopy (AFM) data [...]

SU8-graphene: a new photo-patternable conductive polymer composite

Majidian M., Grimaldi C., Baibarac M., Baltog I., Forró L., Magrez A., EPFL, CH

SU8 epoxy is a photo-resist with great intrinsic properties such as high thermal stability, chemical and mechanical robustness along with high sensitivity to UV. Having eight reactive epoxy sites in each monomer molecule, a high [...]

MedeA: An environment for ICME starting with atoms, and what we can learn from it

Saxe P., Materials Design, Inc., US

ICME is a grand vision, but there is an enormous amount of work needed to bring together experiment and simulation across the entire spectrum of length- and time-scales to go from atoms to cars, airplanes, [...]

Resonance transmission of the electron wave through the nanofilms containing a magnetic quantum well

Sahakyan A.S., Movsesyan R.M., Kocharian A.N., California State University Los Angeles, US

The transmission of an electron wave through so called a magnetic resonance diode is considered in semiconductor nanofilms consisting of two nonmagnetic barriers separated by a quantum (magnetic) well subjected to an external magnetic field. [...]

A New Method to Fin-width Line Edge Roughness Effect Simulation of FinFET Performance

Zhu Y., Zhao W., Wang W., Wu W., Feng Z., He J., He P., He J., He P., Song L., Peking University Shenzhen SOC Key Laboratory, CN

This paper developed a full three-dimensional (3-D) statistical simulation method to investigate Fin-width Line Edge Roughness (LER) effect on the FinFETs performance. The line edge roughness is introduced by Matlab program, and then the intrinsic [...]

A Full Differential Charge Pump Based on Symmetrical Complementary Half-Current Circuit Architecture

Huang Q., Zhao W., Wang W., Wu W., Du C., Feng Z., He J., He P., He J., He P., Song L., Peking University Shenzhen SOC Key Laboratory, CN

A full differential charge pump with low current mismatch and deviation is designed in this paper based on the symmetric complementary half-current circuit architecture. It adopts two symmetrical complementary P-N replica circuits with half value [...]

Nonholonomic Ab Initio Molecular Dynamics for Computational Materials Design

Fahrenthold E., University of Texas at Austin, US

Nanocomposites research attempts to design new materials with unique or optimized properties, by forming composites at the nanoscale. Previous work has demonstrated the ability to significantly modify the mechanical, electrical, magnetic, thermal, or chemical properties [...]