Papers – Page 29 – TechConnect Briefs

Bulk-Titanium Waveguide – a New Building Block for Microwave Planar Circuits

Huang X.T., Todd S., Ding C., MacDonald N.C., University of California at Santa Barbara, US

We present a new topology for planar microwave transmission line: bulk titanium waveguide. The waveguide is formed by deep trench etching, dielectric gap filling, and planarization. The high aspect ratio of the resulting structure provide [...]

Towards an efficient multidisciplinary system-level framework for designing and modeling complex engineered microsystems

Clark J.V., Zeng Y., Jha P., Purdue University, US

We present advances in designing and modeling complex microsystems at the network/system-level. For design, we develop a graphical user interface that allows users to quickly configure complex systems in 3D using a computer mouse or [...]

Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms

Khalilyulin R., Schrag G., Wachutka G., Münich University of Technology, DE

We present a high-level model of a dual gimbaled mass gyroscope, which provides an accurate physical description of the impact of external and internal disturbances on the output signal, but which also allows for the [...]

High-Stability Numerical Algorithm for the Simulation of Deformable Electrostatic MEMS Devices

Rottenberg X., Nauwelaers B., De Raedt W., Elata D., IMEC, BE

This paper presents a novel high-stability algorithm for the simulation of the electromechanical actuation of electrostatic MEMS devices. Its stability improves on that of voltage- and charge-drive algorithms. It further offers a purely electrical simulation [...]

Fast Methods for Particle Dynamics in Dielectrophoretic and Oscillatory Flow Biochips

Chowdhury I., Wang X., Jandhyala V., University of Washington, US

This paper presents novel BEM for particle transport in microfluidic channels. Code performance and simulation results are presented

Non traditional dicing of MEMS devices

Sullivan S., Yoshikawa T., DISCO Corp., JP

Dicing of MEMS contains a host of challenges. Contamination, vibration, thermal, and electrical sensitivity dictate modified or non traditional dicing processes. Focusing a laser beam inside of the silicon substrate creating a modified layer is [...]

Fabrication of nanoscale nozzle for electrostatic field induced inkjet head and test of drop-on-demand operation

Nguyen V.D., Byun D., Bui S., Tran Q., Schrlau M., Bau H.H., Lee S., Konkuk University, KR

Printing technology is considered to be a key technology even in the fields of electronics, materials processing, and biotechnology. However there is a genuine need for nano-to-macro integration technology for printing. This paper presents the [...]

Detection of Plant Cell Compartments and Changes in Cell Dielectric due to Arsenic Absorption via Traveling Wave Dielectrophoresis

Bunthawin S., Wanichapichart P., Tuantranont A., Membrane Science and Technology Research Center, TH

This study determined changes in cell dielectric properties due to variation of arsenic concentration of the cell suspending medium, from 1 to 150 ppm. An octa-pairs interdigitated electrode was used to induce dielectrophoresis, and the [...]

Evidence of the Existence of Complete Phononic Band Gaps in Phononic Crystal Plates

Mohammadi S., Eftekhar A.A., Khelif A., Hunt W.D., Adibi A., Georgia Institute of Technology, US

We show, by measuring the transmission through a phononic crystal (PC) plate, the evidence of the existence of large phononic band gaps (PBGs) in two-dimensional PCs made by a hexagonal (honeycomb) array of holes etched [...]

Stacked Coupled-Disk MEMS Resonators for RF Applications

Nygaard K.H., Grinde C., Fjeldly T.A., Norwegian University of Science and Technology, NO

A novel, stacked coupled-disk resonator design is presented where the silicon discs vibrate in radial contour modes, actuated by electrodes wrapped around the disk periphery. The self-aligned, central stem mediates the coupling and also anchors [...]