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Home2001March

Month: March 2001

TechConnect Proceedings Papers

A Simple and Scalable Model for Spiral Inductors on Silicon

Sia C.B., Yeo K.S., Goh W.L., Swe T.N., Ma J.G., Do M.A., Lin J.S., Chan L., Nanyang Technological University, US
A new, simple and scalable inductor model for silicon-based spiral inductors has been presented in this paper. Compared to the conventional model, it can predict accurately the inductive characteristics and quality factor for inductors of [...]

Study of a Novel Isotropic Suspension Design for an Angular Gyroscope

Painter C., Shkel A., University of California Irvine, US
This paper describes the analysis of a novel isotropic suspension designed for use in a Micro Electro Mechanical System (MEMS) z-axis angular gyroscope.The suspension,consisting of six concentric interconnected rings rigidly attached to an anchored frame,supports [...]

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

Jianqiang M., Shixin C., Yi L., Data Storage Institute, SG
The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from [...]

MEMS Simulation in Heavily Doped Silicon Devices

Matsuda K., Kanda Y., Naruto University of Education, US
Simulation of the semiconductor transport under heavily doped and stressed conditions is presented. The degenerate statistics are introduced by taking into account the density-of-state functions for the band tail and the impurity band. The momentum-dependent [...]

On the Utility of Airborne MEMS for Improving Meteorological Analysis and Forecasting

Manobianco J., Short D.A., ENSCO, Inc., JP
Among the applications envisioned for Micro ElectroMechanical Systems (MEMS) sensors are weather observations from probes that are suspended in the atmosphere and carried by wind currents. This paper describes preliminary experiments with a state-of-the-science numerical [...]

A Novel Polymer Nanofiber Interface for Chemical and Biochemical Sensor Applications

Kwoun S.J., Lee R.M., Han B., Ko F.K., Drexel University, US
Polymer thin films are used extensively as a chemically sensing medium in variety types of acoustic sensors. It is well known that the sensitivity of a sensing film is proportional to the surface area of [...]

Modeling and Dynamic Simulation of Electrostatically Driven Micromirror

Kweon S., Lee H., Shin H., Samsung Electronics Co.Ltd., US
Dynamic behavior of the electrostatically driven bi-directional micromirror system was simulated with ANSYS parametric design language. The objective of the study is to construct a dynamic simulation scheme for the transient properties of electrostatically coupled [...]

Modeling and Simulation of THUNDER Actuators Using ANSYS Finite Element Analysis

Kennedy C., Usher T., Mulling J., Kingon A., Think Peak, Inc., DE
The use of a quarter-symmetry three-dimensional finite element analysis model in predicting the behavior of the laminated piezoceramic material device known as THUNDER actuators is investigated. The analyses simulating the fabrication process and subsequ

Effects of Slider-Driven Piezo-Microactuator Placements and Profiles on HGA Sway Mode

Yang J.P., Chen S.X., National University of Singapore, US
With areal recording density of hard disk drives (HDD) historically growing at an average of 60% per year, it is becoming increasingly more difficult to maintain the precise positioning required of the ever-smaller GMR heads [...]

Development of Patterned SMA Strips as Self-Heating Resistors

Chen J., Cheng X.L., Cai B.C., Xu D., Wang L., Cheng X.L., Shanghai Jiao Tong University, SG
A way to develop the pattern of shape memory alloys (SMA) titanium-nickel (TiNi) strips for improving the actuation performance of membrane microactuator is described in this paper. The patterned SMA strips serve not only as [...]

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