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Home2001March

Month: March 2001

TechConnect Proceedings Papers

Electromechanical and Microwave S-parameter Properties of a Wide Tuning Range MEMS Tunable Capacitor

Chen J., Zou J., Liu C., Kang S-M, University of Illinois, CN
We present the electromechanical and microwave properties of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate [...]

The Applicability of Temperature Correction to Chemoresistive Sensors in an e-NOSE-ANN System

Hobson R., Guiseppi-Elie A., Commonwealth University, US
The influence of the temperature sensitivity of chemoresistive, inherently-conductive-polymer (ICP) sensors on the performance of an artificial neural network (ANN) e-NOSE system is evaluated. Temperature was found to strongly influence the responses of t

Surface Chemistry Effects in Finite Element Modeling of Heat Transfer in µ-fuel Cells

Havstad M.A., Lawrence Livermore National Laboratory, US
Equations for modeling surface chemical kinetics by the interaction of gaseous and surface species are presented. The formulation is embedded in a finite element heat transfer code and an ordinary differential equation package is used [...]

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators

Guidotti P., Bernstein D., California Institute of Technology, US
We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]

Vibration Analysis of Quartz Yaw-Rate Sensor to Reduce Mechanical Coupling

Fujiyoishi M., Nononmura Y., Omura Y., Tsukada K., Matsushige S., Kurata N., Toyota Central R&D Labs, JP
For a yaw-rate sensor (gyroscope), the reduction of mechanical coupling phenomenon is a key technology for achieving high performance. We analyze the phenomenon with a combination of two models, (1) a static model of a [...]

Thermal Frequency Drift of Resonant Microsensor

Shen F., Lu P., O'Shea S.J., Lee K.H., Pradhan S.C., Ng T.Y., Institute for High Performance Computing, SG
Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along [...]

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Basrour S., Majjad H., Coudevylle J.R., Coudevylle J.R., de Labachèlerie M., CNRS, FR
This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]

Multiple Solutions in Electrostatic MEMS

Pelesko J.A., Georgia Institute of Technology, US
The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer [...]

Modeling a High Power Density MEMS Magnetic Induction Machine

Köser H., Lang J.H., Massachusetts Institute of Technology, US
Most micro-scale electric and magnetic machines studied in the last decade lack the power density to support many practical applications. The magnetic induction machine reported here attempts to transcend this practicality barrier by offering power [...]

Simulation of Shape Memory Devices with Coupled Finite Element Programs

Krevet B., Kohl M., Forschungszentrum Karlsruhe, DE
This paper presents thermal and mechanical calculations on micro devices driven by electrical heating of a shape memory alloy (SMA). For simulation a program packages has been developed to allow coupling of single task Finite [...]

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