Papers – Page 15 – TechConnect Briefs

Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications

Mohamed A., Elsimary H., Ismail M., Ohio State University, US

In this work a new design of a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q- tunable capacitor has been accomplished through bulk micromachining process with all metal [...]

HDL-A-Model of a Micromachined Tuning Fork Gyroscope

Eichholz J., Quenzer J., Schwarzelbach O., Weiß M., Wenk B., FhG-ISIT, DE

The HDLA-model presented describes the electrical and mechanical behavior of a micromachined silicon tuning fork gyroscope. This gyro will be excited by electrostatic forces and the Coriolis induced torsion motion will be read out capacitively. [...]

Modeling and Optimization of Bi-stable Optical Switch

Maekoba H., Helin P., Reyne G., Bourouina T., Fujita H., Cybernet Systems Co. Ltd., JP

High performance silicon-based, micro-optical switch are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure [...]

Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects

Veijola T., Helsinki University of Technology, FI

Compact models for the viscous damping coefficient in narrow air gaps between laterally moving structures are reported. The gas rarefaction effects are included in these small-displacement models. In the first part of the paper, a [...]

Investigation of the Dynamics of Microdevices – As a Design Tool

Seter D.J., Degani O., Kaldor S., Scher E., Nemirovsky Y., RAFAEL Microsystems Group, IL

When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a [...]

Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators

Francis E.H., Kumaran R., Chua B.L., Logeeswaran V.J., National University of Singapore, SG

This paper reports on the significant discrepancy between the analytical and experimental resonant frequencies of the folded beam micro resonators. Experimental results for the resonant frequency showed a consistent 20% discrepancy over theoretical and finite [...]

Layout Synthesis of CMOS MEMS Accelerometers

Gupta V., Mukherjee T., Carnegie Mellon University, US

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]

Macro-Modeling of Systems Including Free-Space Optical MEMS

Kurzweg T.P., Morris A.S., Uiversity of Pittsburgh, US

One barrier to the integration of MEMS devices into optical systems is the lack of a system-level CAD tool allowing the optimization of MOEMS designs simultaneously with embedding control electronics. Our work addresses this issue [...]

Towards Microelectrofluidic System (MEFS) Computing and Architecture

Dewey A., Fair R.B., Jopling J., Ding J., Zhang T., Cao F., Schreiner B., Pollack M., Duke University, US

This paper presents the rationale, design, and simulation of next-generation microelectro fluidic system computational architectures for the emerging field of bioinformatics. Current microelectro fluidic processors (e.g. biochips) have largely dedicated architectures supporting relatively specialized applications. [...]

Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures

Hardtmann M., Aigner R., Nadal R., Wachutka G., Münich University of Technology, DE

Design and verification of complete microsystems require effective models of the micromechanical components for the simulation at system level. Particularly for force feedback S/D-architectures, long transient simulations are inevitable to characterize the system-inherent signal pro-cessing. [...]