Papers – Page 11 – TechConnect Briefs

Intelligent Automatic Meshing of Multilayer CMOS Micromachined Structures for Finite Element Analysis

Lakdawala H., Baidya B., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

In this paper, we describe an automatic technique for meshing multilayer CMOS micromachined structure for Finite Element Analysis (FEA) from device layout. The technique is based on a 3D canonical representation of the different CMOS [...]

Modeling of Piezoelectric MEMS Using the Finite Cloud Method

Ohs R.R., Aluru N.R., University of Illinois, US

In this paper we present a meshless based Finite Cloud Method (FCM) for the numerical solution of partial differential equations (PDEs) governing piezoelectricity. Using a point distribution, FCM constructs interpolation functions without assuming any connectivity [...]

Compact Modeling of Bistable Electrostatic Actuators

Xu J., Darling R.B., Lauritzen P.O., University of Washington, US

A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a [...]

A Compact Model for an IC Lateral Diffused MOSFET Using the Lumped-Charge Methodology

Subramanian Y., Lauritzen P.O., Green K.R., Texas Instruments, US

A compact model for an IC Lateral Diffused MOSFET is developed using the Lumped-Charge Methodology[1]. Model equations and key performance characteristics are documented. They satisfy the requirements of Power MOSFET models[2], unlike the competitive macromodels [...]

Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems

Lu M.S., Fedder G.K., Carnegie Mellon University, US

VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication [...]

Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds

Rembe C., Hofer E.P., Tibken B., University of Ulm, DE

Model based evaluation of high speed cinematographic image sequences is demonstrated for a microrelay which was manufactured using the LIGA technology. The measurements of the microrelay have been performed with an experimental setup based on [...]

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices

Nguyen L., Lee H.J., Maher M.A., von Sosen H., Tanner Research, Inc., US

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices Categories: Co-simulation and Optimization System, Multi-level Modeling Linh Nguyen, Hee Jung Lee, Mary Ann Maher, and Harald von Sosen Tanner Research, Inc. VLSI [...]

Electro-Mechanical Transducer for MEMS Analysis in ANSYS

Gyimesi M., Ostergaard D., ANSYS, Inc., US

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

Analytical Modeling of Beam Behavior Under Different Actuations

Sarraute E., Dufour I., URA CNRS 1375, FR

The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with current, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the [...]

A Model of Photoelectric Phenomena in MOS Structures at Low Electric Fields

Przewlocki H.M., Institute of Electron Technology, PL

This paper presents a new model of photoelectric phenomena taking place in MOS structures at low electric fields in the dielectric. Solutions of models equations are analyzed and discussed. Using these equations various photoelectric characteristics [...]